论文信息 - CMOS integrated ZnO thin film bulk acoustic resonator with Si3N4 susceptor layer for improved IR sensitivity - 字舞流文

CMOS integrated ZnO thin film bulk acoustic resonator with Si3N4 susceptor layer for improved IR sensitivity

Marco R. Cavallari | Christine K. McGinn | I. Kymissis | P. Kinget | H. Edrees | Aida R. Colón-Berríos