Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature

A new technology has been developed to grow layers of amorphous hydrogenated Silicon Carbide in vacuum, at temperatures below 100-120°C by Physical Enhanced Chemical Vapour Deposition (PE-CVD) technology. The layers have been used either to improve the surface quality of SiC mirror substrates (produced by methods different of the CVD approach, like e.g. sintered SiC) as a super-polishable cladding coatings, or to form self-sustaining thin mirrors in SiC. It should be noted that the PE-CVD claddings can be applied also to substrates different than SiC, as e.g. metals like Al or Kanigen, in order to create a high durability polishable external layer. It this paper we present the results of a wide characterization of the new material, considering the mechanical, structural and optical properties that are the most indicative parameters for its application in optics, with particular reference to the production of mirrors for ground and space astronomical applications.

[1]  K. Enya,et al.  High‐Precision CTE Measurement of SiC‐100 for Cryogenic Space Telescopes , 2007, 0704.1515.

[2]  Michael I. Anapol,et al.  Silicon carbide lightweight telescopes for advanced space applications , 1994, Other Conferences.

[3]  Fred Jansen,et al.  XMM: advancing science with the high-throughput X-ray spectroscopy mission. , 1999 .

[4]  Oberto Citterio,et al.  Lightweight SiC foamed mirrors for space applications , 2001, SPIE Optics + Photonics.

[5]  Oberto Citterio,et al.  SiC-foamed mirror for telescope operating in space or on ground , 1997, Other Conferences.

[6]  R. Bunshah,et al.  Effects of activated reactive evaporation process parameters on the microhardness of polycrystalline silicon carbide thin films , 1994 .

[7]  A EaleyM,et al.  CERAFORM SiC: roadmap to 2 meters and 2kg/m2 areal density. , 1997 .

[8]  Paolo Conconi,et al.  Characteristics of the flight model optics for the JET-X telescope onboard the Spectrum-X-Gamma satellite , 1996, Optics & Photonics.

[9]  Andris Ezis,et al.  Application of hot-pressed silicon carbide to large high-precision optical structures , 1995, Optics & Photonics.

[10]  Denis Bolshukhin,et al.  Thermal management design and verification of collector optics into high-power EUV source systems , 2007, SPIE Advanced Lithography.

[11]  Partha S. Dutta,et al.  Low temperature deposition of nanocrystalline silicon carbide films by plasma enhanced chemical vapor deposition and their structural and optical characterization , 2003 .

[12]  Daniel de Chambure,et al.  A Φ 3.5m diameter Sic telescope for Herschel mission , 2003, SPIE Astronomical Telescopes + Instrumentation.

[13]  J. Spyromilio,et al.  The European Extremely Large Telescope (E-ELT) , 2007 .

[14]  Roberto Gilmozzi,et al.  Proceedings of the Backaskog workshop on extremely large telescopes , 2000 .

[15]  Jitendra S. Goela,et al.  Optics applications of chemical vapor deposited beta-SiC , 1997, Optics + Photonics.

[16]  H. Philip Stahl,et al.  Mirror technology roadmap for optical/IR/FIR space telescopes , 2006, SPIE Astronomical Telescopes + Instrumentation.

[17]  Rodolfo Canestrari,et al.  Correction of high spatial frequency errors on optical surfaces by means of ion beam figuring , 2007, SPIE Optical Engineering + Applications.

[18]  Michel Fruit,et al.  SiC telescope demonstrator (mirrors and structure): optomechanical performances , 1999, Optical Systems Design.

[19]  Bernd Harnisch,et al.  ULTRA-LIGHTWEIGHT C/SIC MIRRORS AND STRUCTURES , 1998 .

[20]  Roger A. Paquin,et al.  Materials for mirror systems: an overview , 1995, Optics & Photonics.

[21]  Michael N. Tolstoy,et al.  Three-mirror anastigmatic telescope with a 60-cm aperture diameter and mirrors made of silicon carbide , 1995, Optics & Photonics.

[22]  D. Spiga,et al.  Characterization of a flat superpolished mandrel prototype with hard (TiN/SiC) overcoating to enhance the surface durability , 2004, SPIE Optics + Photonics.