Apparatus for measuring integrated light scattering of optical components over an extended range of wavelengths

A total integrated scattering measurement set-up is described which enables the detection of scattered light within a spatial frequency range from 0.0041 micrometers-1 to 4 micrometers-1. The apparatus is based on a Coblentz sphere and is equipped with light sources in the wavelength range from the UV to IR. Examples are presented of measurements on samples with rms- roughnesses from angstroms to microns.