Enhancement of Coplanar Capacitor Models and Verification Up to 67GHz for (M) MIC Circuit Design

The IMST has recently built up a library with recently more than 18 coplanar elements for CAD applications (2), (3). The theory of the parametric models is based on a quasi static 3D Finite Difference formulation (1). Naghed also introduced in (1) the model of a coplanar interdigital capacitor and presented the verification of this element up to 25GHz. Beyond 40GHz and for long fingers these simulation results diverge from measured data. This paper will report on the enhanced coplanar IDC model and 2 new types of coplanar capacitors - a serial and a parallel MIM capacitor, where line effects are taken into account. The equivalent circuit elements are determined in units per length. The simulated results will be compared with measured data from test circuits on a GaAs wafer up to 67GHz. Parts of these activities are supported by the European Community within the ESPRIT CLASSIC project.