High power-efficiency terahertz quantum cascade laser*

We demonstrate continuous-wave (CW) high power-efficiency terahertz quantum cascade laser based on semi-insulating surface-plasmon waveguide with epitaxial-side down (Epi-down) mounting process. The performance of the device is analyzed in detail. The laser emits at a frequency of ~ 3.27 THz and has a maximum CW operating temperature of ~ 70 K. The peak output powers are 177 mW in pulsed mode and 149 mW in CW mode at 10 K for 130-μm-wide Epi-down mounted lasers. The record wall-plug efficiencies in direct measurement are 2.26% and 2.05% in pulsed and CW mode, respectively.

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