Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT’s variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after sealing with the pump body). The maximum displacement under forced vibration is less than that under free vibration. The maximum displacement is inversely proportional to the diameter of the transducer and directly proportional to the driving voltage under both free and forced vibration. Micropumps with diffuser/nozzle microvalves are designed and fabricated with different external diameters of the PZTs. Finally, the flow rate and pressure of the micropumps are measured, which are consistent with the vibrational results. Moreover, the maximum displacement is larger under a square-wave driving signal, followed by a sine-wave signal, and then a triangle-wave signal. For a PZT with an external diameter of 12 mm, the maximum flow rate and pressure value are 150 μl/min and 346 Pa, respectively, under sine-wave driving at 100 Vpp driving voltage.

[1]  J. Sirohi,et al.  Fundamental Understanding of Piezoelectric Strain Sensors , 1999, Smart Structures.

[2]  Nam-Trung Nguyen,et al.  MEMS-Micropumps: A Review , 2002 .

[3]  L. Shuyu.  Analysis of the sandwich piezoelectric ultrasonic transducer in coupled vibration. , 2005, The Journal of the Acoustical Society of America.

[4]  Longtu Li,et al.  Simulations and analysis of a piezoelectric micropump. , 2006, Ultrasonics.

[5]  G. Pezzotti,et al.  Investigation of local orientation and stress analysis of PZT-based materials using micro-probe polarized raman spectroscopy , 2006 .

[6]  L S Pan,et al.  CFD Simulations of Flows in Valveless Micropumps , 2007 .

[7]  Yavuz Yaman,et al.  Smart structures and their applications on active vibration control: Studies in the Department of Aerospace Engineering, METU , 2008 .

[8]  U. Lei,et al.  A study of PZT valveless micropump with asymmetric obstacles , 2009 .

[9]  Xiaotang Hu,et al.  Study on structure optimization of a piezoelectric cantilever with a proof mass for vibration-powered energy harvesting system , 2009 .

[10]  Yu Zhou,et al.  Current micropump technologies and their biomedical applications , 2009 .

[11]  T. X. Dinh,et al.  A cross-junction channel valveless-micropump with PZT actuation , 2009 .

[12]  Shuyu Lin.  An improved cymbal transducer with combined piezoelectric ceramic ring and metal ring , 2010 .

[13]  Zhu Xiaojin,et al.  Analysis of active vibration control for piezoelectric intelligent structures by ANSYS and MATLAB , 2010, 2010 International Conference on Computer Application and System Modeling (ICCASM 2010).

[14]  C. A. Cortes-Quiroz,et al.  Analysis of double-chamber parallel valveless micropumps , 2010 .

[15]  A. Tuantranont,et al.  Design, Fabrication and Analysis of Silicon Hollow Microneedles for Transdermal Drug Delivery System for Treatment of Hemodynamic Dysfunctions , 2010, Cardiovascular engineering.

[16]  Gregory W. Auner,et al.  Simulation and verification of a piezoelectrically actuated diaphragm for check valve micropump design , 2011 .

[17]  S. Hassanizadeh,et al.  A novel deep reactive ion etched (DRIE) glass micro-model for two-phase flow experiments. , 2012, Lab on a chip.

[18]  E. Yıldırım,et al.  A normally closed electrostatic parylene microvalve for micro total analysis systems , 2012 .

[19]  A. Hladky-Hennion,et al.  Reducing crosstalk in array structures by controlling the excitation voltage of individual elements: a feasibility study. , 2013, Ultrasonics.

[20]  G. Cao,et al.  Measurements of Piezoelectric Coefficient d33 of Lead Zirconate Titanate Thin Films Using a Mini Force Hammer , 2013 .

[21]  Jia Zhi-kai.  Loss coefficient and rectification efficiency based on valveless micropump , 2013 .

[22]  Xiujian Chou,et al.  Fabrication of micro-trench structures with high aspect ratio based on DRIE process for MEMS device applications , 2013 .

[23]  Zhonghua Zhang,et al.  A piezoelectric micropump with an integrated sensor based on space-division multiplexing , 2013 .

[24]  Chang Nyung Kim.  Internal pressure characteristics and performance features of the piezoelectric micropumps with the diffuser/nozzle and electromagnetic resistance , 2014 .

[25]  P. Mendes,et al.  Piezoelectric actuators for acoustic mixing in microfluidic devices—Numerical prediction and experimental validation of heat and mass transport , 2014 .

[26]  Y. Taitel,et al.  The Piezoelectric Valve-Less Pump: Series and Parallel Connections , 2015 .

[27]  Gu Yan-fang,et al.  Structural parameter analysis and experimental study of micropumps with saw-tooth microchannel , 2015 .

[28]  Borut Pečar,et al.  Micropump operation at various driving signals: numerical simulation and experimental verification , 2015 .

[29]  Ashis Kumar Sen,et al.  Analytical modeling, simulations and experimental studies of a PZT actuated planar valveless PDMS micropump , 2015 .

[30]  M. Shafii,et al.  Diffuser miniature pump with an extra ferrofluidic valve , 2015 .

[31]  Xiuhua He,et al.  A bidirectional valveless piezoelectric micropump with three chambers applying synthetic jet , 2016 .

[32]  D. Chatterjee,et al.  Experimental characterization of piezoelectrically actuated micromachined silicon valveless micropump , 2016 .

[33]  J. Kan,et al.  Development of a self-sensing piezoelectric pump with a bimorph transducer , 2016 .

[34]  Sidra Waheed,et al.  3D printed microfluidic devices: enablers and barriers. , 2016, Lab on a chip.

[35]  Shyh-Chin Huang,et al.  Theoretical analysis of a new adjustable broadband PZT beam vibration energy harvester , 2016 .

[36]  Jaime Viegas,et al.  Piezoelectric micromachined ultrasonic transducers and micropumps: from design to optomicrofluidic applications , 2017, BiOS.

[37]  Chih-Jer Lin,et al.  Characteristic studies of a novel piezoelectric impedance micropump , 2017 .

[38]  Peng Liu,et al.  Microfluidic fluorescence-activated cell sorting (μFACS) chip with integrated piezoelectric actuators for low-cost mammalian cell enrichment , 2017 .