A method of imaging and mapping features of a plurality arranged on a wafer chip and function wafer having a plurality of function chips and reference chips

A method for mapping features of a plurality arranged on a wafer chip, comprising the steps of: - Determine selective properties of the function chips - Save the properties of the function chips in a mapping table, and - setting a plurality of reference chips on the wafer to allow an assignment of the stored characteristics to the individual functional chips, characterized in that - to provide the plurality of reference chips each having a unique label, - the function chips LED chips, and - on the wafer in each case groups of adjacent function chips contain a reference chip.