Fiber-optic micro vibration sensors fabricated by a femtosecond laser

Abstract Fiber-optic micro vibration sensors fabricated by a femtosecond laser are proposed and experimentally demonstrated. The proposed sensor is an extrinsic Fabry–Perot interferometer (EFPI), which is the three-section structure sandwiched by a single mode fiber (SMF), a hollow core fiber (HCF) and a coreless silica fiber (CF). A femtosecond laser is employed to fabricate the cantilever beam. The ablation process does not affect reflectivity of the mirrors of the EFPI, resulting in the high visibility of the interferometric fringe. The vibration can be interrogated by using the quadrature passive demodulation. The experimental results show that the sensitivity of 20.678 mV/g@500 Hz is achieved in the acceleration range of 0–10 g. The frequency response of the ANSYS simulation and the experimental results are compared with the frequency range from 100 Hz to 3000 Hz, and the resonant frequency is 1920 Hz.

[1]  Y. Jiang,et al.  Magnetic fluid-filled microhole in the collapsed region of a photonic crystal fiber for the measurement of a magnetic field. , 2013, Optics letters.

[2]  Mitsuteru Kimura,et al.  Vibration sensor using optical-fiber cantilever with bulb-lens , 1998 .

[3]  Orlando Frazão,et al.  Focused ion beam post-processing of optical fiber Fabry-Perot cavities for sensing applications. , 2014, Optics express.

[4]  Sumei Wang,et al.  Femtosecond laser fabricated all-optical fiber sensors with ultrahigh refractive index sensitivity: modeling and experiment. , 2011, Optics express.

[5]  Yang Song,et al.  Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser. , 2017, Optics letters.

[6]  Kin Seng Chiang,et al.  Temperature-insensitive fiber-Bragg-grating-based vibration sensor , 2001 .

[7]  X. Qiao,et al.  Large Frequency Range and High Sensitivity Fiber Bragg Grating Accelerometer Based on Double Diaphragms , 2014, IEEE Sensors Journal.

[8]  Tao Wei,et al.  Miniaturized fiber inline Fabry-Perot interferometer fabricated with a femtosecond laser. , 2008, Optics letters.

[9]  Amardeep Kaur,et al.  High-temperature fiber-optic Fabry-Perot interferometric pressure sensor fabricated by femtosecond laser. , 2013, Optics letters.

[10]  Xiaoyi Bao,et al.  In-line fiber microcantilever vibration sensor , 2013 .

[11]  J. Yang,et al.  Fiber Mach-Zehnder interferometer based on microcavities for high-temperature sensing with high sensitivity. , 2011, Optics letters.

[12]  Ping Shum,et al.  Temperature-insensitive accelerometer based on a strain-chirped FBG , 2010 .

[13]  Satoshi Kawata,et al.  Finer features for functional microdevices , 2001, Nature.

[14]  Minoru Obara,et al.  Optical vibration sensor fabricated by femtosecond laser micromachining , 2005 .

[15]  Somnath Bandyopadhyay,et al.  Fiber Bragg grating accelerometer with enhanced sensitivity , 2012 .

[16]  D. P. Hand,et al.  Micro-Machined Optical Fiber Side-Cantilevers for Acceleration Measurement , 2017, IEEE Photonics Technology Letters.