Addressing the needs of complex MEMS design

In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot.

[1]  S. K. Gupta,et al.  MEMS Component Extraction , 1999 .

[2]  James Demmel,et al.  New Numerical Techniques and Tools in SUGAR for 3D MEMS Simulation , 2001 .

[3]  R. Frisch-Fay.  A New Approach to the Analysis of the Deflection of Thin Cantilevers , 1961 .

[4]  James Demmel,et al.  3D MEMS Simulation Modeling Using Modified Nodal Analysis , 2001 .

[5]  S. F. Bart,et al.  AutoMM: automatic generation of dynamic macromodels for MEMS devices , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[6]  Irene A. Stegun,et al.  Handbook of Mathematical Functions. , 1966 .

[7]  Kristofer S. J. Pister,et al.  Torsional Micromirrors with Lateral Actuators , 2001 .

[8]  R. Craig,et al.  Model reduction and control of flexible structures using Krylov vectors , 1991 .