论文信息 - Bis(cyclopentadienyl) zirconium(IV) amides as possible precursors for low pressure CVD and plasma-enhanced ALD - 字舞流文

Bis(cyclopentadienyl) zirconium(IV) amides as possible precursors for low pressure CVD and plasma-enhanced ALD

Se Stephen Potts | C. Carmalt | C. Blackman | W. Kessels | N. Leick | P. N. Heys | F. Abou-Chahine | S. Potts | Hywel Davies | H. Davies