论文信息 - OF YOUNG ’ S MODULUS OF PZT AND Co 80 Ni 20 THIN FILMS BY MEANS OF MICROMACHINED CANTILEVERS - 字舞流文

OF YOUNG ’ S MODULUS OF PZT AND Co 80 Ni 20 THIN FILMS BY MEANS OF MICROMACHINED CANTILEVERS

L. Abelmann | M. Siekman | H. Nazeer | M. Elwenspoek | N. Tas | J. V. Honschoten