Electrostatically driven vacuum-encapsulated polysilicon resonators part II. theory and performance

[1]  J. Eisley.  Nonlinear vibration of beams and rectangular plates , 1964 .

[2]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[3]  R. Howe,et al.  Resonant-microbridge vapor sensor , 1986, IEEE Transactions on Electron Devices.

[4]  K. D. Wise,et al.  One-port active polysilicon resonant microstructures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[5]  Miko Elwenspoek,et al.  In situ phosphorus-doped polysilicon for excitation and detection in micromechanical resonators , 1990 .

[6]  Deepak Uttamchandani,et al.  Measurement of Young's modulus and internal stress in silicon microresonators using a resonant frequency technique , 1990 .

[7]  Henry Guckel,et al.  Performance characteristics of second generation polysilicon resonating beam force transducers , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[8]  Jan H. J. Fluitman,et al.  Single element excitation and detection of (micro-)mechanical resonators , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[9]  H. Tilmans.  Micro-mechanical sensors using encapsulated built-in resonant strain gauges , 1991 .

[10]  N. F. de Rooij,et al.  Capacitive polysilicon resonator with MOS detection circuit , 1991 .

[11]  Mohd P. Omar,et al.  Theoretical modeling of boundary conditions in microfabricated beams , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[12]  Kurt E. Petersen,et al.  Resonant beam pressure sensor fabricated with silicon fusion bonding , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[13]  Miko Elwenspoek,et al.  Micro resonant force gauges , 1992 .

[14]  P. Parsons,et al.  Resonant sensor for high accuracy pressure measurement using silicon technology , 1992 .

[15]  Harrie A.C. Tilmans,et al.  Static and dynamic aspects of an air-gap capacitor , 1992 .

[16]  David W. Burns,et al.  Polysilicon resonant microbeam technology for high performance sensor applications , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[17]  D. W. Burns,et al.  Characteristics of polysilicon resonant microbeams , 1992 .

[18]  M. K. Andrews,et al.  A comparison of squeeze-film theory with measurements on a microstructure , 1993 .

[19]  H. Schurer,et al.  (Electro-) mechanical characteristics of electrostatically driven vacuum encapsulated polysilicon resonators , 1994, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  H. Tilmans,et al.  Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication , 1994 .