论文信息 - Fabrication of GaAs fine stripe structures by selective metalorganic chemical vapor deposition using diethylgalliumchloride

Fabrication of GaAs fine stripe structures by selective metalorganic chemical vapor deposition using diethylgalliumchloride

Selective GaAs fine stripe structures, aligned along 〈011〉 direction, were grown by atmospheric‐pressure metalorganic chemical vapor deposition using diethylgalliumchloride. The width of the (100) top surface of the triangle‐shaped selective epilayers could be changed from 0 to 25 nm by controlling the growth temperature, and was independent of the growth time. This phenomena can be explained by reevaporation enhancement effect of reactant species containing chloride and two‐dimensional nucleation.

K. Yamaguchi | K. Okamoto

[1] K. Yamaguchi,et al. Selective Epitaxial Growth on (100) Vicinal GaAs Surfaces by Atmospheric Pressure-Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride , 1991 .

[2] K. Yamaguchi,et al. Selective Epitaxial Growth of AlGaAs by Atmospheric Pressure –MOCVD Using Diethylgalliumchloride and Diethylaluminiumchloride , 1990 .

[3] P. Roentgen,et al. GaInAs/InP selective area metalorganic vapor phase epitaxy for one‐step‐grown buried low‐dimensional structures , 1990 .

[4] J. A. Lebens,et al. Application of selective epitaxy to fabrication of nanometer scale wire and dot structures , 1990 .

[5] D. Tsui,et al. Two‐dimensional electron gas on etched GaAs sidewalls by liquid phase epitaxial regrowth , 1989 .

[6] K. Yamaguchi,et al. Lateral Growth of GaAs over SiO2 Films Prepared on (111)B Substrates by Metalorganic Chemical Vapor Deposition , 1989 .

[7] T. Fukui,et al. New GaAs quantum wires on , 1989 .

[8] Gaines,et al. Optical anisotropy in a quantum-well-wire array with two-dimensional quantum confinement. , 1989, Physical review letters.

[9] W. Wiegmann,et al. Structure of AlAs‐GaAs interfaces grown on (100) vicinal surfaces by molecular beam epitaxy , 1984 .

[10] E. Kapon,et al. Patterned quantum well heterostructures grown by OMCVD on non-planar substrates: Applications to extremely narrow SQW lasers , 1988 .