Improving the dielectric properties of an electrowetting-on-dielectric microfluidic device with a low-pressure chemical vapor deposited Si3N4 dielectric layer.

Dielectric breakdown is a common problem in a digital microfluidic system, which limits its application in chemical or biomedical applications. We propose a new fabrication of an electrowetting-on-dielectric (EWOD) device using Si3N4 deposited by low-pressure chemical vapor deposition (LPCVD) as a dielectric layer. This material exhibits a greater relative permittivity, purity, uniformity, and biocompatibility than polymeric films. These properties also increase the breakdown voltage of a dielectric layer and increase the stability of an EWOD system when applied in biomedical research. Medium droplets with mouse embryos were manipulated in this manner. The electrical properties of the Si3N4 dielectric layer-breakdown voltage, refractive index, relative permittivity, and variation of contact angle with input voltage-were investigated and compared with a traditional Si3N4 dielectric layer deposited as a plasma-enhanced chemical vapor deposition to confirm the potential of LPCVD Si3N4 applied as the dielectric layer of an EWOD digital microfluidic system.

[1]  Zhaoying Zhou,et al.  An ELISA Chip Based on an EWOD Microfluidic Platform , 2012 .

[2]  K. Naruse,et al.  Application of a microfluidic sperm sorter to the in-vitro fertilization of porcine oocytes reduced the incidence of polyspermic penetration. , 2010, Theriogenology.

[3]  Robert P. Luoma,et al.  Digital microfluidic magnetic separation for particle-based immunoassays. , 2012, Analytical chemistry.

[4]  C. Simmons,et al.  A digital microfluidic platform for primary cell culture and analysis. , 2012, Lab on a chip.

[5]  Wyatt C. Nelson,et al.  Droplet Actuation by Electrowetting-on-Dielectric (EWOD): A Review , 2012 .

[6]  Junghoon Lee,et al.  Improvement in the breakdown properties of electrowetting using polyelectrolyte ionic solution. , 2013, Langmuir : the ACS journal of surfaces and colloids.

[7]  Hong Liu,et al.  Dielectric materials for electrowetting-on-dielectric actuation , 2009 .

[8]  George M. Whitesides,et al.  How to Make Water Run Uphill , 1992, Science.

[9]  Chang-Jin Kim,et al.  Addressable micro liquid handling by electric control of surface tension , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[10]  F. Wang,et al.  Pipetting causes shear stress and elevation of phosphorylated stress‐activated protein kinase/jun kinase in preimplantation embryos , 2007, Molecular reproduction and development.

[11]  Shi Lei,et al.  IR and Raman absorption spectroscopic studies of APCVD, LPCVD and PECVD thin SiN films , 2002 .

[12]  S. Cho,et al.  Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits , 2003 .

[13]  C. Kim,et al.  Electrowetting and electrowetting-on-dielectric for microscale liquid handling , 2002 .

[14]  M. Shanahan,et al.  Young-Lippmann equation revisited for nano-suspensions , 2013 .

[15]  J. Lammertyn,et al.  Biofunctionalization of electrowetting-on-dielectric digital microfluidic chips for miniaturized cell-based applications. , 2011, Lab on a chip.

[16]  Behrouz Abedian,et al.  Low voltage electrowetting using thin fluoroploymer films. , 2006, Journal of colloid and interface science.

[17]  Joseph A Loo,et al.  Incubated protein reduction and digestion on an electrowetting-on-dielectric digital microfluidic chip for MALDI-MS. , 2010, Analytical chemistry.

[18]  Wolfgang Kronast,et al.  LPCVD against PECVD for micromechanical applications , 1996 .

[19]  W. Su,et al.  Enhanced ultraviolet electroluminescence from ZnO nanowires in TiO2/ZnO coaxial nanowires/poly(3,4-ethylenedioxythiophene)-poly(styrene-sulfonate) heterojunction , 2010 .

[20]  Seong Ho Kong,et al.  Dielectrically stabilized electrowetting on AF1600/Si3N4/TiO2 dielectric composite film , 2011 .

[21]  Michael George Pollack,et al.  ELECTROWETTING-BASED MICROACTUATION OF DROPLETS FOR DIGITAL MICROFLUIDICS , 2001 .

[22]  Yves Fouillet,et al.  Coplanar electrowetting-induced stirring as a tool to manipulate biological samples in lubricated digital microfluidics. Impact of ambient phase on drop internal flow pattern. , 2013, Biomicrofluidics.

[23]  R. Fair,et al.  Low Voltage Electrowetting-on-Dielectric Platform using Multi-Layer Insulators. , 2010, Sensors and actuators. B, Chemical.

[24]  D. Yao,et al.  Applications of EWOD Systems for DNA Reaction and Analysis , 2012 .

[25]  M. Cheng,et al.  Electrowetting on dielectric experiments using graphene , 2012, Nanotechnology.

[26]  Richard B Fair,et al.  Sensors and Actuators B: Chemical Low Voltage Picoliter Droplet Manipulation Utilizing Electrowetting-on-dielectric Platforms , 2022 .

[27]  Hyejin Moon,et al.  On-chip drop-to-drop liquid microextraction coupled with real-time concentration monitoring technique. , 2011, Analytical chemistry.

[28]  Krishnendu Chakrabarty,et al.  A Reagent-Saving Mixing Algorithm for Preparing Multiple-Target Biochemical Samples Using Digital Microfluidics , 2012, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

[29]  C. Kim,et al.  Characterization of electrowetting actuation on addressable single-side coplanar electrodes , 2006 .