论文信息 - Stability and residual stresses of sputtered wurtzite AlScN thin films - 字舞流文

Stability and residual stresses of sputtered wurtzite AlScN thin films

M. Caro | M. Klaus | C. Genzel | T. Pensala | M. Paulasto-Kröckel | M. Meixner | Andreas Hollmann | G. Ross | A. Žukauskaitė | P. Koppinen | E. Österlund | M. Trębala | M. A. Caro