Actuation of resonant MEMS using short pulsed forces

Abstract We describe a method for exciting a micro-mechanical resonator using short pulsed forces. A brief impulse excites the system whenever it passes its position of equilibrium, thus bringing it to oscillate. This actuation strategy is described from a theoretical point of view and a possible application to the case of a resonant accelerometer is presented. Results of the simulation of the entire process, obtained with VHDL–AMS, are given and commented. This actuation scheme offers several advantages: it can be applied to several sorts of excitation techniques; it reduces possible non-linearity problems; such as those associated with electrostatic actuation; it does not require any special design of the oscillating microstructure (as opposed to linear comb-drives solutions). Additionally, the electronic circuitry needed to realize the system is simple and is therefore a good alternative to other techniques for driving MEMS at resonance.

[1]  Sangkyung Sung,et al.  Design and performance test of an oscillation loop for a MEMS resonant accelerometer , 2003 .

[2]  G. Fedder,et al.  Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS , 2002 .

[3]  Michiel Steyaert,et al.  An oscillator circuit for electrostatically driven silicon-based one-port resonators , 1996 .

[4]  Peter Enoksson,et al.  "Burst" technology with feedback-loop control for capacitive detection and electrostatic excitation of resonant silicon sensors , 2000 .

[5]  Sangkyung Sung,et al.  Development of a tunable resonant accelerometer with self-sustained oscillation loop , 2000, Proceedings of the IEEE 2000 National Aerospace and Electronics Conference. NAECON 2000. Engineering Tomorrow (Cat. No.00CH37093).

[6]  Peter Enoksson,et al.  A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using `burst' technology , 2000 .

[7]  Orla Feely,et al.  A tutorial introduction to non‐linear dynamics and chaos and their application to sigma–delta modulators , 1997 .

[8]  R. Howe,et al.  Microelectromechanical filters for signal processing , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[9]  Barry E. Jones,et al.  Design and performance characteristics of an integrated high-capacity DETF-based force sensor , 1996 .

[10]  Shanthi Pavan,et al.  An analytical solution for a class of oscillators, and its application to filter tuning , 1998 .

[11]  R. Howe,et al.  An integrated CMOS micromechanical resonator high-Q oscillator , 1999, IEEE J. Solid State Circuits.

[12]  Weiyuan Wang,et al.  Future of microelectromechanical systems (MEMS) , 1996 .

[13]  A. M. Robinson,et al.  Simple resonating microstructures for gas pressure measurement , 2002 .

[14]  Farrokh Ayazi,et al.  Micromachined inertial sensors , 1998, Proc. IEEE.

[15]  Martin Haueis,et al.  A fully packaged single crystalline resonant force sensor , 2001 .

[16]  M. K. Andrews,et al.  A resonant pressure sensor based on a squeezed film of gas , 1993 .

[17]  C. P. Lewis.  Prediction of I imit cycle conditions in non-linear sampled data systems , 1979 .