Fabrication of Vertically Stacked Nanosheet Junctionless Field-Effect Transistors and Applications for the CMOS and CFET Inverters
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Yao-Jen Lee | C. Su | P. Sung | K. Kao | T. Chao | Shu-Wei Chang | Wen-Hsi Lee | F. Hsueh | C. Wu | Ta-Chun Cho | Shu‐Wei Chang