论文信息 - Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges - 字舞流文

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

O. V. Braginsky | V. Ivanov | D. Voloshin | Y. Mankelevich | A. Rakhimov | A. Kovalev | D. Lopaev | T. Rakhimova | O. Braginsky | O. Proshina | A. Vasilieva | M. Olevanov