Design of Defect Inspection System for FED Electrodes Based on Probe Method

In allusion to the characteristics of the FED electrode,a kind of defect inspection system for FED electrodes is proposed in this paper,which can detect the defects of short circuit and open circuit,etc. The system includes hardware and software. The hardware is composed of CCD camera (initial location and orientation),single-chip (data testing and transmission) and computer (data receiving and processing). The software consists of program design of single-chip pretreatment and advanced programming of computer object orientation. The defect inspection system has been applied to the fabrication of FED electrodes after the design and installation of hardware and program debugging of software.