论文信息 - Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation - 字舞流文

Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation

I. Milova | V. Zhakhovskyb | D. Ilnitskyb | K. Migdalb | V. Khokhlovd | Yu. Petrovd | N. Inogamovc | V. Lippf | N. Medvedevg | B. Ziajaf | V. Medvedeve | I. A. Makhotkina | E. Louisa | F. Bijkerka