Plasma directed assembly and organization: bottom-up nanopatterning using top-down technology
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G Kokkoris | A Tserepi | E. Gogolides | V. Constantoudis | D. Kontziampasis | N. Vourdas | G. Kokkoris | A. Tserepi | M. Cooke | V Constantoudis | E Gogolides | N Vourdas | D Kontziampasis | A Goodyear | M Cooke | A. Goodyear
[1] R. Gago,et al. Self-Organized Surface Nanopatterning by Ion Beam Sputtering , 2007, 0706.2625.
[2] Joel K. W. Yang,et al. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates , 2008, Science.
[3] George M. Whitesides,et al. Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer , 1998, Nature.
[4] S. Maclaren,et al. Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development , 1992 .
[5] R. M. Bradley,et al. Theory of ripple topography induced by ion bombardment , 1988 .
[6] Angeliki Tserepi,et al. Nanotexturing of poly(dimethylsiloxane) in plasmas for creating robust super-hydrophobic surfaces , 2006 .
[7] F. Frost,et al. Roughness evolution of ion sputtered rotating InP surfaces: pattern formation and scaling laws. , 2000, Physical review letters.
[8] G. Whitesides,et al. Microfabrication meets microbiology , 2007, Nature Reviews Microbiology.
[9] E. Gogolides,et al. Nano-texturing of poly(methyl methacrylate) polymer using plasma processes and applications in wetting control and protein adsorption , 2009 .
[10] Vincent M. Rotello,et al. Self-assembly of nanoparticles into structured spherical and network aggregates , 2000, Nature.
[11] E. Gogolides,et al. Plasma Etching and Roughening of Thin Polymeric Films: A Fast, Accurate, in situ Method of Surface Roughness Measurement , 2008 .
[12] E. Gogolides,et al. Roughness Formation During Plasma Etching of Composite Materials: A Kinetic Monte Carlo Approach , 2007, IEEE Transactions on Plasma Science.
[13] S. Sivoththaman,et al. Formation of nanoscale columnar structures in silicon by a maskless reactive ion etching process , 2006 .
[14] J. Muñoz-García,et al. Order enhancement and coarsening of self-organized silicon nanodot patterns induced by ion-beam sputtering , 2006 .
[15] Chi-Chun Liu,et al. Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography , 2008 .
[16] R. V. Duyne,et al. Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces , 1995 .
[17] F. Frost,et al. Surface engineering with ion beams: from self-organized nanostructures to ultra-smooth surfaces , 2008 .
[18] E. Gogolides,et al. Nanotextured super-hydrophobic transparent poly(methyl methacrylate) surfaces using high-density plasma processing , 2007 .
[19] Kostya Ostrikov. Plasma nanoscience: from nature's mastery to deterministic plasma-aided nanofabrication , 2006 .
[20] H. T. Kim,et al. Formation of silicon nitride nanopillars in dual-frequency capacitively coupled plasma and their application to Si nanopillar etching , 2007 .
[21] J. Gómez‐Herrero,et al. WSXM: a software for scanning probe microscopy and a tool for nanotechnology. , 2007, The Review of scientific instruments.
[22] Jongseung Yoon,et al. Enabling nanotechnology with self assembled block copolymer patterns , 2003 .
[23] I. Introduction,et al. Mound formation in surface growth under shadowing , 2006 .
[24] R. Palmer,et al. Fabrication of silicon cones and pillars using rough metal films as plasma etching masks , 1999 .
[25] Kurz,et al. Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering. , 1999, Science.
[26] F. Frost,et al. The shape and ordering of self-organized nanostructures by ion sputtering , 2004 .
[27] E. Gogolides,et al. Dual nanoscale roughness on plasma-etched Si surfaces: Role of etch inhibitors , 2007 .
[28] Debajyoti Das,et al. Generally Applicable Self-Masked Dry Etching Technique for Nanotip Array Fabrication , 2004 .
[29] Igor Levchenko,et al. Nanostructures of various dimensionalities from plasma and neutral fluxes , 2007 .
[30] A Tserepi,et al. Mechanisms of oxygen plasma nanotexturing of organic polymer surfaces: from stable super hydrophilic to super hydrophobic surfaces. , 2009, Langmuir : the ACS journal of surfaces and colloids.
[31] Igor Levchenko,et al. Deterministic shape control in plasma-aided nanotip assembly , 2006 .
[32] Davide Mariotti,et al. Plasma-driven self-organization of Ni nanodot arrays on Si(100) , 2008 .