On-chip eddy current sensor for proximity sensing and crack detection

Abstract In this paper, we present a new integrated eddy current sensor for proximity sensing and for the detection of microcracks on the surface of metals. The device consists of two stacked planar coils fabricated onto a glass substrate and encapsulated on one side by a Ni/Fe permalloy magnetic core. Fabrication of the device is achieved by a UV–LIGA thick photoresist lithography process, which involves the lithographic patterning of 15–25 μm thick molds using AZ-4000 series photoresist. The introduction of the permalloy core coupled with the thick conductor lines produces a high inductance, low resistance device capable of generating large magnetic fields at low driving currents. The device has been tested in the frequency range of 10–500 kHz and has been shown to work as both a proximity sensor and crack detector at input powers of 30 mW or less. When used as a proximity sensor, the unamplified output voltage on the sensing coil changes by as much as 75 mV with an aluminum target placed at a distance of 400 μm from the coil. The device has also shown the capability of clearly detecting cracks with depths of as little as 8 mil (200 μm) in both aluminum and titanium. Results show an extremely linear relation between crack depth and output signal voltage with an unamplified signal strength of several millivolts.