Fibre optic sensor: Integration with micromachined devices

Micromachining exploits photolithographic techniques to fabricate mechanical structures with extremely precise dimensional tolerances. A wide variety of micromachining techniques has become available with the capabilities to fabricate structures of ever increasing mechanical complexity. The dimensional tolerances are immediately compatible with optical sub-assemblies and the potential for batch production of substantial numbers of identical structures at very low cost is most attractive. This paper examines the role of micromachined structures in the specific context of optical fibre sensor technology. A number of demonstrator sensor systems has been produced and evaluated, though the details of the interface between an optical fibre link and the sensor head itself have proved difficult to realize as a practical sensor element. However, the recognition that this technology, with its capacity to withstand high temperature operation and its immunity to adverse chemical and electromagnetic environments, can solve very difficult instrumentation problems points towards the future consolidation into applications specific technological development.

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