Finite element reduced order models for nonlinear vibrations of piezoelectric layered beams with applications to NEMS

This article presents a finite element reduced order model for the nonlinear vibrations of piezoelectric layered beams with application to NEMS. In this model, the geometrical nonlinearities are taken into account through a von Karman nonlinear strain-displacement relationship. The originality of the finite element electromechanical formulation is that the system electrical state is fully described by only a couple of variables per piezoelectric patches, namely the electric charge contained in the electrodes and the voltage between the electrodes. Due to the geometrical nonlinearity, the piezoelectric actuation introduces an original parametric excitation term in the equilibrium equation. The reduced-order formulation of the discretized problem is obtained by expanding the mechanical displacement unknown vector onto the short-circuit eigenmode basis. A particular attention is paid to the computation of the unknown nonlinear stiffness coefficients of the reduced-order model. Due to the particular form of the von Karman nonlinearities, these coefficients are computed exactly, once for a given geometry, by prescribing relevant nodal displacements in nonlinear static solutions settings. Finally, the low-order model is computed with an original purely harmonic-based continuation method. Our numerical tool is then validated by computing the nonlinear vibrations of a mechanically excited homogeneous beam supported at both ends referenced in the literature. The more difficult case of the nonlinear oscillations of a layered nanobridge piezoelectrically actuated is also studied. Interesting vibratory phenomena such as parametric amplification or patch length dependence of the frequency output response are highlighted in order to help in the design of these nanodevices.

[1]  Olivier Thomas,et al.  A harmonic-based method for computing the stability of periodic solutions of dynamical systems , 2010 .

[2]  H. Seppa,et al.  Nonlinear limits for single-crystal silicon microresonators , 2004, Journal of Microelectromechanical Systems.

[3]  Pma Paul Slaats,et al.  MODEL REDUCTION TOOLS FOR NONLINEAR STRUCTURAL DYNAMICS , 1995 .

[4]  Olivier Thomas,et al.  A Harmonic-Based Method for Computing the Stability of Periodic Oscillations of Non-Linear Structural Systems , 2010 .

[5]  Sebastien Hentz,et al.  Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films , 2009 .

[6]  Sergio Preidikman,et al.  Nonlinear free and forced oscillations of piezoelectric microresonators , 2006 .

[7]  B. Reig,et al.  Nonlinear dynamics of nanomechanical beam resonators: improving the performance of NEMS-based sensors , 2009, Nanotechnology.

[8]  K. Jensen,et al.  An atomic-resolution nanomechanical mass sensor. , 2008, Nature Nanotechnology.

[9]  Liviu Nicu,et al.  Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers. , 2011, Nanotechnology.

[10]  Sorin Perisanu,et al.  Digital and FM demodulation of a doubly clamped single-walled carbon-nanotube oscillator: towards a nanotube cell phone. , 2010, Small.

[11]  T. Kenny,et al.  What is the Young's Modulus of Silicon? , 2010, Journal of Microelectromechanical Systems.

[12]  Marcus Meyer,et al.  Efficient model reduction in non-linear dynamics using the Karhunen-Loève expansion and dual-weighted-residual methods , 2003 .

[13]  Christian Soize,et al.  Stochastic reduced order models for uncertain geometrically nonlinear dynamical systems , 2008, Computer Methods in Applied Mechanics and Engineering.

[14]  Wanda Szemplińska-Stupnicka,et al.  The Behavior of Nonlinear Vibrating Systems , 1990 .

[15]  Salim Belouettar,et al.  Active control of nonlinear vibration of sandwich piezoelectric beams: A simplified approach , 2008 .

[16]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[17]  Cv Clemens Verhoosel,et al.  Non-Linear Finite Element Analysis of Solids and Structures , 1991 .

[18]  Daniel Rixen,et al.  Reduction methods for MEMS nonlinear dynamic analysis , 2011 .

[19]  Ghader Rezazadeh,et al.  Pure parametric excitation of a micro cantilever beam actuated by piezoelectric layers , 2010 .

[20]  R. Lewandowski Computational formulation for periodic vibration of geometrically nonlinear structures—part 2: Numerical strategy and examples , 1997 .

[21]  Liviu Nicu,et al.  Piezoelectric properties of PZT films for microcantilever , 1999 .

[22]  M. Zamanian,et al.  Nonlinear vibration of an electrically actuated microresonator tuned by combined DC piezoelectric and electric actuations , 2009 .

[23]  Cyril Touzé,et al.  BUCKLING AND NON-LINEAR VIBRATIONS OF A MEMS BIOSENSOR , 2008 .

[24]  Alexander F. Vakakis,et al.  NONLINEAR NORMAL MODES , 2001 .

[25]  M. Roukes Nanoelectromechanical Systems , 2000, cond-mat/0008187.

[26]  Peidong Yang,et al.  Self-transducing silicon nanowire electromechanical systems at room temperature. , 2008, Nano letters.

[27]  Christophe Pierre,et al.  Finite-Element-Based Nonlinear Modal Reduction of a Rotating Beam with Large-Amplitude Motion , 2003 .

[28]  E. de Langre,et al.  Statics and Dynamics of a Nanowire in Field Emission , 2010 .

[29]  M. Crisfield Non-Linear Finite Element Analysis of Solids and Structures, Essentials , 1997 .

[30]  Nader Jalili,et al.  On the nonlinear-flexural response of piezoelectrically driven microcantilever sensors , 2009 .

[31]  Cyril Touzé,et al.  ASYMMETRIC NON-LINEAR FORCED VIBRATIONS OF FREE-EDGE CIRCULAR PLATES. PART 1: THEORY , 2002 .

[32]  Gaëtan Kerschen,et al.  Nonlinear normal modes, Part II: Toward a practical computation using numerical continuation techniques , 2009 .

[33]  M. Blencowe Nanoelectromechanical systems , 2005, cond-mat/0502566.

[34]  Nader Jalili,et al.  Non-linear vibrations and frequency response analysis of piezoelectrically driven microcantilevers , 2007 .

[35]  M. R. Freeman,et al.  Multifunctional Nanomechanical Systems via Tunably Coupled Piezoelectric Actuation , 2007, Science.

[36]  Francesco dell’Isola,et al.  Extension of the Euler-Bernoulli model of piezoelectric laminates to include 3D effects via a mixed approach , 2006 .

[37]  Siak Piang Lim,et al.  PROPER ORTHOGONAL DECOMPOSITION AND ITS APPLICATIONS – PART II: MODEL REDUCTION FOR MEMS DYNAMICAL ANALYSIS , 2002 .

[38]  Jonathan E. Cooper,et al.  a Combined Modal/finite Element Analysis Technique for the Dynamic Response of a Non-Linear Beam to Harmonic Excitation , 2001 .

[39]  Christophe Vergez,et al.  A high-order, purely frequency based harmonic balance formulation for continuation of periodic solutions: The case of non-polynomial nonlinearities , 2008, 0808.3839.

[40]  Paolo Tiso,et al.  Reduction Method for Finite Element Nonlinear Dynamic Analysis of Shells , 2011 .

[41]  Roman Lewandowski,et al.  Computational formulation for periodic vibration of geometrically nonlinear structures—part 1: Theoretical background , 1997 .

[42]  Olivier Thomas,et al.  Vibrations of an elastic structure with shunted piezoelectric patches: efficient finite element formulation and electromechanical coupling coefficients , 2009 .

[43]  Abhijit Mukherjee,et al.  Nonlinear dynamic response of piezolaminated smart beams , 2005 .

[44]  L. Azrar,et al.  Nonlinear vibration analysis of actively loaded sandwich piezoelectric beams with geometric imperfections , 2008 .

[45]  Michael L. Roukes,et al.  Efficient parametric amplification in high and very high frequency piezoelectric nanoelectromechanical systems , 2010 .

[46]  Jx X. Gao,et al.  Active control of geometrically nonlinear transient vibration of composite plates with piezoelectric actuators , 2003 .

[47]  Sorin Perisanu,et al.  Self-oscillations in field emission nanowire mechanical resonators: a nanometric dc-ac conversion. , 2007, Nano letters.

[48]  S. Rizzi,et al.  Determination of nonlinear stiffness with application to random vibration of geometrically nonlinear structures , 2003 .

[49]  I. Mahboob,et al.  Bit storage and bit flip operations in an electromechanical oscillator. , 2008, Nature nanotechnology.

[50]  A. Chaigne,et al.  Asymmetric non-linear forced vibrations of free-edge circular plates. Part II: Experiments , 2003 .