论文信息 - Homoepitaxy on Porous Silicon with a Buried Oxide Layer: Full-Wafer Scale SOI - 字舞流文

Homoepitaxy on Porous Silicon with a Buried Oxide Layer: Full-Wafer Scale SOI

A. Dvurechenskii | A. Gutakovskii | L. Sokolov | S. I. Romanov | V. Kirienko | R. Grötzschel | M. Lamin