A mode-matched 0.9 MHZ single proof-mass dual-axis gyroscope

This paper reports on the design, fabrication, and characterization of a high-frequency single proof-mass dual-axis gyroscope. The hollow-disk pitch-and-roll resonant gyroscope has electrostatically tunable in-plane and out-of-plane resonance modes to enable mode-matched operation at ∼ 0.9MHz in the presence of process non-idealities such as thickness variations of the SOI wafer. A prototype device demonstrates x- and yaxis rate sensitivity of 127µV/deg/sec and 214µV/deg/sec, respectively. High quality factors (Q) of ∼ 10,000 are observed in vacuum for the in-plane drive and out-of-plane sense resonance modes. The device is implemented using a revised version of the HARPSS™ process, thereby enabling a single-chip tri-axial implementation when integrated with a yaw disk gyroscope.