Formation of p-type MgZnO by nitrogen doping

A wurtzite N-doped MgZnO film with 20at.% Mg (MgZnO:N) was grown by plasma-assisted molecular beam epitaxy on c-plane sapphire using radical NO as oxygen source and nitrogen dopant. The as-grown MgZnO:N film behaves n-type conduction at room temperature, but transforms into p-type conduction after annealed for 1h at 600°C in an O2 flow. The p-type MgZnO:N has a hole concentration of 6.1×1017cm−3 and a mobility of 6.42cm2∕Vs. X-ray photoelectron spectroscopy measurement indicates that substitution of N for O site is in forms of N atom (N)O and N molecule (N2)O for the as-grown MgZnO:N, but almost only in a form of (N)O for the annealed MgZnO:N. The mechanism of the conduction-type transition induced by annealing is discussed in the present work.

[1]  T. Venkatesan,et al.  Realization of band gap above 5.0 eV in metastable cubic-phase MgxZn1−xO alloy films , 2002 .

[2]  Hiroshi Katayama-Yoshida,et al.  Solution Using a Codoping Method to Unipolarity for the Fabrication of p-Type ZnO , 1999 .

[3]  B. Li,et al.  P‐type ZnO thin films prepared by plasma molecular beam epitaxy using radical NO , 2005 .

[4]  H. Ohno,et al.  Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO , 2004 .

[5]  S. Sahu,et al.  Formation of boron nitride thin films on β-Si3N4 whiskers and α-SiC platelets by dip-coating , 1998 .

[6]  Masashi Kawasaki,et al.  Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films , 1998 .

[7]  Xiaomin Li,et al.  p-type conduction in wide-gap Zn1−xMgxO films grown by ultrasonic spray pyrolysis , 2005 .

[8]  Hyun-Sik Kim,et al.  Realization of p-type ZnO thin films via phosphorus doping and thermal activation of the dopant , 2003 .

[9]  David P. Norton,et al.  p-type behavior in phosphorus-doped (Zn,Mg)O device structures , 2004 .

[10]  D. C. Reynolds,et al.  Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy , 2002 .

[11]  Robert P. H. Chang,et al.  Second harmonic generation in laser ablated zinc oxide thin films , 1998 .

[12]  Sehee Lee,et al.  Identification of nitrogen chemical states in N-doped ZnO via x-ray photoelectron spectroscopy , 2005 .

[13]  D. Shen,et al.  Effects of nitrogen doping and illumination on lattice constants and conductivity behavior of zinc oxide grown by magnetron sputtering , 2006 .

[14]  Akira Ohtomo,et al.  MgxZn1−xO as a II–VI widegap semiconductor alloy , 1998 .

[15]  R. Zhang,et al.  Blue-yellow ZnO homostructural light-emitting diode realized by metalorganic chemical vapor deposition technique , 2006 .