Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter

We have demonstrated a temperature-insensitive micromachined vertical cavity filter with an AlGaAs-GaAs distributed Bragg reflector (DBR), which can be thermally tuned by differential thermal expansion. The achieved temperature dependence was as small as +0.01 nm/K, which is one-tenth of that of conventional semiconductor based optical filters.