Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer
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[1] Roger de Reus,et al. Fabrication and characterization of a piezoelectric accelerometer , 1999 .
[2] S. Beeby,et al. Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems , 1999 .
[3] Neil M. White,et al. A novel thick-film PZT/micromachined silicon accelerometer , 1999 .
[4] Neil M. White,et al. Thick-film printing of PZT onto silicon , 1997 .
[5] A. J. Mouthaan,et al. Electrical cross-talk in two-port resonators the resonant silicon beam force sensor , 1992 .
[6] S. Beeby,et al. An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon , 2000 .
[7] Neil M. White,et al. Thick film PZT/micromachined silicon accelerometer , 1999 .
[8] Neil M. White,et al. A novel micropump design with thick-film piezoelectric actuation , 1997 .
[9] Jn Ross,et al. Design and fabrication of a micromachined silicon accelerometer with thick-film printed PZT sensors , 2000 .
[10] Katsuhiro Aoki,et al. Preparation of <100>-oriented Lead-Zirconate-Titanate Films by Sol-Gel Technique , 1993 .
[11] I. Novotný,et al. R.f. reactive sputtering of zinc oxide films on silicon and SiSiO2TiN substrates , 1992 .
[12] Neil M. White,et al. Thick-film printing of PZT onto silicon for micromechanical applications , 1998 .