Photo-Induced Coplanar Waveguide RF Switch and Optical Crosstalk on High-Resistivity Silicon Trap-Rich Passivated Substrate

A continuous-wave mode optically controlled coplanar waveguide radio frequency (RF) switch on high-resistivity silicon substrate with and without trap-rich polysilicon (poly-Si) layer is investigated. Because of the local poly-Si trap-rich layer, we experimentally show the important reduction of optical crosstalk without degrading the photo-controlled RF switch performance. A photo-induced plasma confinement by locally etching the poly-Si layer to control the photogenerated free carriers and their lateral diffusion is realized. Optical crosstalk between two coplanar waveguide RF switches is reduced by at 20 GHz.

[1]  J-P Raskin,et al.  RF Harmonic Distortion of CPW Lines on HR-Si and Trap-Rich HR-Si Substrates , 2012, IEEE Transactions on Electron Devices.

[2]  Kyounghoon Yang,et al.  Investigation of adjacent channel crosstalk in multichannel monolithically integrated 1.55 /spl mu/m photoreceiver arrays , 1997 .

[3]  J. Raskin,et al.  RF Performance of a Commercial SOI Technology Transferred Onto a Passivated HR Silicon Substrate , 2008, IEEE Transactions on Electron Devices.

[4]  C.C. Wu,et al.  RF loss and crosstalk on extremely high resistivity (10 k-1 M/spl Omega/-cm) Si fabricated by ion implantation , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[5]  B. Cabon,et al.  Photoconductivity effects in polycrystalline silicon and optically controlled coplanar waveguide switch , 2001, Ann. des Télécommunications.

[6]  A. Gharsallah,et al.  Ultrawide Frequency Range Crosstalk Into Standard and Trap-Rich High Resistivity Silicon Substrates , 2011, IEEE Transactions on Electron Devices.

[7]  W. Platte,et al.  Effective photoconductivity and plasma depth in optically quasi-CW controlled microwave switching devices , 1988 .

[8]  A. Jourdain,et al.  MEMS tunable capacitors and switches for RF applications , 2004, 2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716).

[9]  Stephen E. Saddow,et al.  Optical control of microwave-integrated circuits using high-speed GaAs and Si photoconductive switches , 1995 .

[10]  D. Lederer,et al.  New substrate passivation method dedicated to HR SOI wafer fabrication with increased substrate resistivity , 2005, IEEE Electron Device Letters.

[11]  F. Deshours,et al.  A novel optically-controlled microwave switch on semiconductor substrates for an ON/OFF ratio enhancement , 2003, 33rd European Microwave Conference Proceedings (IEEE Cat. No.03EX723C).

[13]  Alwyn J. Seeds,et al.  Optical control of microwave semiconductor devices , 1990 .

[14]  W. Platte,et al.  Optically CW-induced losses in semiconductor coplanar waveguides , 1989 .

[15]  Denis Flandre,et al.  Substrate crosstalk reduction using SOI technology , 1997 .

[16]  J. Raskin,et al.  Microwave characterization of optically modulated photo-induced switches with a passivation layer using an LSNA , 2008, 2008 72nd ARFTG Microwave Measurement Symposium.

[17]  T. S. Low,et al.  Microwave switch: LAMPS (light-activated microwave photoconductive switch) , 2003 .

[18]  R. H. Voelker.  Transposing conductors in signal buses to reduce nearest-neighbor crosstalk , 1995 .

[19]  J. Raskin,et al.  Optical crosstalk reduction using a HR-si substrate with trap-rich passivation layer , 2007, 2007 European Microwave Conference.

[20]  J. Papapolymerou,et al.  Electronic switchable bandpass filter using PIN diodes for wireless low cost system-on-a-package applications , 2004 .

[21]  V. Fusco,et al.  Low-loss CPW lines on surface stabilized high-resistivity silicon , 1999, IEEE Microwave and Guided Wave Letters.

[22]  J. Vardaxoglou,et al.  Frequency and beam reconfigurable antenna using photoconducting switches , 2006, IEEE Transactions on Antennas and Propagation.