Design and simulation study for an electro-thermally actuated micromanipulator

New design for an electro-thermally actuated SU-8 polymeric microgrippers is presented, simulated and analyzed. The electro-thermally driven microgrippers were studied using computer simulations (the Finite Element Method using CoventorWare software tool). Numerical simulations - coupled electro-thermo-mechanical simulations - were performed. We investigated the influence of the temperatures achieved in the microgripers' arms and the deflections of the tips, as functions of the applied voltages. A numerical simulation of the electro-thermo-mechanical behaviour of the microgrippers has been done and an evaluation of the results obtained from simulations (using FEM) was performed. The simulations results show a good mechanical behaviour of the micromanipulator in order to operate in air.

[1]  Albert P. Pisano,et al.  Polysilicon microgripper , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[2]  C. Tibeica,et al.  Method for overcoming the unwanted displacements of an electro-thermally actuated microgripper , 2007 .

[3]  P. Vettiger,et al.  Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[4]  N. Chronis,et al.  Electrothermally activated SU-8 microgripper for single cell manipulation in solution , 2005, Journal of Microelectromechanical Systems.

[5]  Rebecca S. Shawgo,et al.  Biocompatibility and biofouling of MEMS drug delivery devices. , 2003, Biomaterials.

[6]  R. Muller,et al.  Analysis of Displacements of a Polymeric Microgripper , 2007, 2007 International Semiconductor Conference.

[7]  W. Riethmuller,et al.  Thermally excited silicon microactuators , 1988 .

[8]  Mark G. Allen,et al.  High Aspect Ratio SU-8 Structures for 3-D Culturing of Neurons , 2003 .

[9]  Silvestro Micera,et al.  Towards a force-controlled microgripper for assembling biomedical microdevices , 2000 .

[10]  W. Riethmuller,et al.  Applications of silicon microactuators based on bimorph structures , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.