Advances in Scanning Force Microscopy for Dimensional Metrology

This paper presents the state of the art in scanning force microscopy for dimensional metrology. A detailed description is given of the important factors affecting the major components of a scanning force microscope from the metrological point of view. Both instrument design and calibration are discussed together with an overview of industrial applications. Recent achievements by national metrology institutes and others to improve calibration procedures, traceability, reduce measurement uncertainty, ensure consistancy of measurement and broaden the range of applications are described.

[1]  Roland G. Winkler,et al.  Forces affecting the substrate in resonant tapping force microscopy , 1995 .

[2]  Russell D. Young,et al.  The Topografiner: An Instrument for Measuring Surface Microtopography , 1972 .

[3]  G. McClelland,et al.  Atomic Force Microscopy: General Principles and a New Implementation , 1987 .

[4]  D. E. Aston,et al.  Critical Phenomena of Water Bridges in Nanoasperity Contacts , 2001 .

[5]  D. Taatjes,et al.  Quality assessment of atomic force microscopy probes by scanning electron microscopy: Correlation of tip structure with rendered images , 1999, Microscopy research and technique.

[6]  Franz J. Giessibl,et al.  Advances in atomic force microscopy , 2003, cond-mat/0305119.

[7]  Habib Menouar,et al.  Ultrasonic characterization of formation damage: effect of particle sizes , 2003 .

[8]  Petr Klapetek,et al.  Comparison on step height measurements in the nano and micrometre range by scanning force microscopes , 2006 .

[9]  K. Kendall,et al.  Surface energy and the contact of elastic solids , 1971, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[10]  M Hart,et al.  An ångström ruler , 1968 .

[11]  M. Dietzsch,et al.  “Atomic Flat” Silicon Surface for the Calibration of Stylus Instruments , 2006 .

[12]  J. T. Trujillo,et al.  Formation of silicon tips with <1 nm radius , 1990 .

[13]  E. Teague,et al.  The National Institute of Standards and Technology molecular measuring machine project: Metrology and precision engineering design , 1989 .

[14]  Hans D. Hallen,et al.  Quantitative method of image analysis when drift is present in a scanning probe microscope , 2003 .

[15]  N. Amer,et al.  Simultaneous measurement of lateral and normal forces with an optical‐beam‐deflection atomic force microscope , 1990 .

[16]  Masayoshi Esashi,et al.  Electric-field-enhanced growth of carbon nanotubes for scanning probe microscopy , 2002 .

[17]  Hans Nørgaard Hansen,et al.  Surface Topography Characterization Using an Atomic Force Microscope Mounted on a Coordinate Measuring Machine , 1999 .

[18]  C. Heiden,et al.  Force microscope with capacitive displacement detection , 1990 .

[19]  P. Becker,et al.  X-ray Optics in Metrological Applications , 1990 .

[20]  J. Tansock,et al.  Force measurement with a piezoelectric cantilever in a scanning force microscope , 1992 .

[21]  Ludwig Josef Balk,et al.  A universal scanning-probe-microscope-based hybrid system , 2003 .

[22]  P. Hansma,et al.  An atomic-resolution atomic-force microscope implemented using an optical lever , 1989 .

[23]  John A. Kramar,et al.  Nanometre resolution metrology with the Molecular Measuring Machine , 2005 .

[24]  Abraham,et al.  Effect of tip profile on atomic-force microscope images: A model study. , 1988, Physical review letters.

[25]  Yongho Seo,et al.  Fast-scanning shear-force microscopy using a high-frequency dithering probe , 2000 .

[26]  Jean M. Bennett,et al.  Frequency Response Characteristics Of A Mechanical Surface Profilometer , 1987 .

[27]  M. Pisani,et al.  A sample scanning system with nanometric accuracy for quantitative SPM measurements. , 2001, Ultramicroscopy.

[28]  Ndubuisi G. Orji,et al.  Line edge roughness metrology using atomic force microscopes , 2005 .

[29]  D. Rugar,et al.  Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity , 1991 .

[30]  Angela Duparré,et al.  Design and characterization of nanostructured ultrahydrophobic coatings. , 2006, Applied optics.

[31]  Ludger Koenders,et al.  A combined scanning tunnelling microscope and x-ray interferometer , 2001 .

[32]  Dror Sarid,et al.  Tapping-mode scanning force microscopy: Metallic tips and samples , 1996 .

[33]  C. G. Frase,et al.  Results of a round robin measurement on a new CD mask standard , 2005, Other Conferences.

[34]  Kirk Miller,et al.  Tip characterization for CD-AFM: getting to 2 nm, 3 sigma , 2002, SPIE Advanced Lithography.

[35]  Angela Duparré,et al.  Scanning force microscopy for optical surface metrology , 2005, SPIE Optical Systems Design.

[36]  N. D. Rooij,et al.  Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics , 2000 .

[37]  R. Carpick,et al.  A General Equation for Fitting Contact Area and Friction vs Load Measurements. , 1999, Journal of colloid and interface science.

[38]  H. Hertz.  Ueber die Berührung fester elastischer Körper. , 1882 .

[39]  W. Morgenroth,et al.  Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures , 2003 .

[40]  Kiyoshi Takamasu,et al.  Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope , 2003 .

[41]  Koji Takada,et al.  Direct measurement instrument for lattice spacing on regular crystalline surfaces using a scanning tunneling microscope and laser interferometry , 2003 .

[42]  U. Bonse,et al.  Principles and design of Laue-case X-Ray interferometers , 1965 .

[43]  Klony Lieberman,et al.  A fully integrated near‐field optical, far‐field optical, and normal‐force scanned probe microscope , 1996 .

[44]  Noël Bonnet,et al.  Blind restoration method of scanning tunneling and atomic force microscopy images , 1996 .

[45]  Jørgen Garnæs,et al.  True Three‐Dimensional Calibration of Closed Loop Scanning Probe Microscopes , 2006 .

[46]  Peter D. Nellist.  Seeing with electrons , 2005 .

[47]  U. Hartmann,et al.  Theory of van der Waals microscopy , 1991 .

[48]  N. D. Rooij,et al.  Micromachined atomic force microprobe with integrated capacitive read-out , 1992 .

[49]  Jan Greve,et al.  A detailed analysis of the optical beam deflection technique for use in atomic force microscopy , 1992 .

[50]  Gerhard Ulm,et al.  Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications , 2003, SPIE Optics + Photonics.

[51]  J. B. Bryan,et al.  The Abbé principle revisited: An updated interpretation , 1979 .

[52]  Adam S. Foster,et al.  Theories of scanning probe microscopes at the atomic scale , 2003 .

[53]  Konrad Herrmann,et al.  Progress in determination of the area function of indenters used for nanoindentation , 2000 .

[54]  Hans-Ulrich Danzebrink,et al.  Development of a combined interference microscope objective and scanning probe microscope , 2004 .

[55]  David J. Whitehouse,et al.  Application of neural networks to the reconstruction of scanning probe microscope images distorted by finite-size tips , 1995 .

[56]  Jacques Chaussy,et al.  A micromachined actuator for nanopositioning in two dimensions , 1999 .

[57]  Petr Klapetek,et al.  Theoretical analysis of the atomic force microscopy characterization of columnar thin films. , 2003, Ultramicroscopy.

[58]  C. Quate,et al.  AUTOMATED PARALLEL HIGH-SPEED ATOMIC FORCE MICROSCOPY , 1998 .

[59]  Masayoshi Esashi,et al.  Scanning probe microscopy with quartz crystal cantilever , 2005 .

[60]  Heinrich Rohrer.  The nanometer age: Challenge and chance , 1994 .

[61]  S. Gonda,et al.  Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrology , 1999 .

[62]  Douglas J. Thomson,et al.  Effect of tip shape on surface roughness measurements from atomic force microscopy images of thin films , 1995 .

[63]  K. Mørch,et al.  Preparation of platinum/iridium scanning probe microscopy tips , 1999 .

[64]  A. M. Baró,et al.  Observation of liquid neck formation with scanning force microscopy techniques , 1998 .

[65]  A. Bergander,et al.  Monolithic piezoelectric actuators for miniature robotic systems , 2004 .

[66]  Martin P. Seah,et al.  The determination of atomic force microscope cantilever spring constants via dimensional methods for nanomechanical analysis , 2005 .

[67]  Andrew Yacoot.  Metrological Applications of X‐ray Interferometry , 2006 .

[68]  Günter Reiss,et al.  Scanning tunneling microscopy on rough surfaces: Deconvolution of constant current images , 1990 .

[69]  Tony Zijlstra,et al.  New scanning probes for nanotribology , 1997 .

[70]  Max G. Lagally,et al.  Comparison of wear characteristics of etched-silicon and carbon nanotube atomic-force microscopy probes , 2002 .

[71]  D. Sarid,et al.  Compact scanning-force microscope using a laser diode. , 1988, Optics letters.

[72]  Pascal Gallo,et al.  How does a tip tap? , 1997 .

[73]  Kai Dirscherl,et al.  Online correction of scanning probe microscopes with pixel accuracy , 2000 .

[74]  Toshiro Higuchi,et al.  A dual tunneling‐unit scanning tunneling microscope , 1990 .

[75]  G. Dai,et al.  Accurate and traceable calibration of two-dimensional gratings , 2007 .

[76]  Hiroshi Honda,et al.  Real-time atomic encoder using scanning tunnelling microscope and regular crystalline surface , 2006 .

[77]  Hans Nørgaard Hansen,et al.  Modelling and Measurement Uncertainty Estimation for Integrated AFM-CMM Instrument , 2005 .

[78]  J Haycocks,et al.  Traceable calibration of transfer standards for scanning probe microscopy , 2005 .

[79]  David Keller,et al.  Imaging steep, high structures by scanning force microscopy with electron beam deposited tips , 1992 .

[80]  James E. Potzick,et al.  New NIST Photomask Linewidth Standard , 2002, Photomask Technology.

[81]  Gerhard Ulm,et al.  Thickness determination for SiO2 films on Si by X-ray reflectometry at the Si K edge , 2004 .

[82]  Robert J. Hocken,et al.  Development of a virtual probe tip with an application to high aspect ratio microscale features , 2005 .

[83]  J. Vesenka,et al.  Colloidal gold particles as an incompressible atomic force microscope imaging standard for assessing the compressibility of biomolecules. , 1993, Biophysical journal.

[84]  Calvin F. Quate,et al.  Microfabrication of cantilever styli for the atomic force microscope , 1990 .

[85]  K. Dransfeld,et al.  Scanning near-field acoustic microscopy , 1989 .

[86]  Katsushi Nakano,et al.  A novel low profile atomic force microscope compatible with optical microscopes , 1998 .

[87]  Lin-Sien H. Lum,et al.  NIST Recommended Practice Guide: Particle Size Characterization , 2001 .

[88]  N. Taniguchi.  Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing , 1983 .

[89]  Ludger Koenders,et al.  Intercomparison of scanning probe microscopes , 2002 .

[90]  Theodore V. Vorburger,et al.  Industrial Uses of STM and AFM * * Contribution of the National Institute of Standards and Technolog , 1997 .

[91]  Peter Heszler,et al.  Anomalies in Nanostructure Size Measurements by AFM , 2005 .

[92]  M. Meyyappan,et al.  Carbon nanotube tips for scanning probe microscopy: fabrication and high aspect ratio nanometrology , 2005 .

[93]  Gaoliang Dai,et al.  Atomic force probe for sidewall scanning of nano- and microstructures , 2006 .

[94]  J. Stümpel,et al.  Combined optical and X–ray interferometry for high–precision dimensional metrology , 2000, Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[95]  D. Marshall,et al.  Review of progress in quantitative non-destructive evaluation: edited by D. O. Thompson and D. E. Chimenti; published by Plenum, New York, 1983; 1853 pp.; price, U.S. $225.00 , 1985 .

[96]  Hiroyuki Fujita,et al.  Towards atomic force microscopy up to 100 MHz , 2002 .

[97]  Vu Thien Binh,et al.  A mechanical nanosensor in the Gigahertz range-where mechanics meets electronics , 1994 .

[98]  Jakob Schelten,et al.  Bridge configuration of piezoresistive devices for scanning force microscopes , 1998 .

[99]  K. Hasche,et al.  A metrological scanning force microscope used for coating thickness and other topographical measurements , 1998 .

[100]  M. J. Vasile,et al.  Probe characterization for scanning probe metrology , 1992 .

[101]  Lester F. Eastman,et al.  Size‐dependent photoluminescence energy and intensity of selective electron cyclotron resonance‐etched strained InGaAs/GaAs quantum boxes , 1995 .

[102]  Ichiko Misumi,et al.  Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales , 2005 .

[103]  Ronald Dixson,et al.  CD-AFM reference metrology at NIST and SEMATECH , 2005, SPIE Advanced Lithography.

[104]  T. Machleidt,et al.  Reconstruction and Geometric Assessment of AFM Tips , 2006 .

[105]  F. Meli,et al.  Lateral and Vertical Diameter Measurements on Polymer Particles with a Metrology AFM , 2006 .

[106]  Sverre Myhra,et al.  Scanning force microscopy - Calibrative procedures for 'best practice' , 2006 .

[107]  Hisato Ogiso,et al.  Compensation of cross talk in the optical lever deflection method used in atomic force microscopy , 2003 .

[108]  D. Maugis.  Adhesion of spheres : the JKR-DMT transition using a dugdale model , 1992 .

[109]  P. M. Lonardo,et al.  Emerging trends in surface metrology , 2002 .

[110]  B. Taylor,et al.  CODATA recommended values of the fundamental physical constants: 2006 | NIST , 2007, 0801.0028.

[111]  M. W. Cresswell,et al.  CD reference features with sub-five nanometer uncertainty , 2005, SPIE Advanced Lithography.

[112]  G. Binnig,et al.  Single-tube three-dimensional scanner for scanning tunneling microscopy , 1986 .

[113]  M. Tortonese,et al.  Atomic force microscope using piezoresistive cantilevers and combined with a scanning electron microscope , 1994 .

[114]  Wilfried Vandervorst,et al.  Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes , 2001 .

[115]  H. Trumpold,et al.  Silicon Standards for Assessment and Calibration of Stylus Probes , 2002 .

[116]  Calvin F. Quate,et al.  Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operation , 1995 .

[117]  R. Thalmann,et al.  Long-range AFM profiler used for accurate pitch measurements , 1998 .

[118]  Robert Barrett,et al.  Atomic force microscopy using a piezoresistive cantilever , 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

[119]  H. Dai,et al.  Nanotubes as nanoprobes in scanning probe microscopy , 1996, Nature.

[120]  Kiyoshi Takamasu,et al.  Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope , 2003 .

[121]  Kiyoshi Takamasu,et al.  Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM , 2006 .

[122]  D. Keller.  Reconstruction of STM and AFM images distorted by finite-size tips , 1991 .

[123]  Ludger Koenders,et al.  Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy , 2005, SPIE Optical Systems Design.

[124]  Gregory A. Dahlen,et al.  Tip characterization and surface reconstruction of complex structures with critical dimension atomic force microscopy , 2005 .

[125]  Vladimir Mancevski,et al.  Development of a dual-probe Caliper CD-AFM for near model-independent nanometrology , 2002, SPIE Advanced Lithography.

[126]  Urs Staufer,et al.  Symmetrically arranged quartz tuning fork with soft cantilever for intermittent contact mode atomic force microscopy , 2003 .

[127]  Gert Goch,et al.  Contactless Surface Measurement with a New Acoustic Sensor , 1994 .

[128]  Ronald G. Dixson,et al.  Algorithms for calculating single-atom step heights , 1999 .

[129]  Stefano Carabelli,et al.  Lead zirconate titanate cantilever for noncontact atomic force microscopy , 1999 .

[130]  Angela Duparre,et al.  Modeling and characterizing thin film nanostructures for ultrahydrophobic surfaces with controlled optical scatter , 2004, SPIE Optical Systems Design.

[131]  Makoto Mizuno,et al.  Development of a Flexure-Hinged Translation Mechanism Driven by Two Piezoelectric Stacks , 1995 .

[132]  Peter Vettiger,et al.  Sequential position readout from arrays of micromechanical cantilever sensors , 1998 .

[133]  O. Wolter,et al.  Micromachined silicon sensors for scanning force microscopy , 1991 .

[134]  Ludger Koenders,et al.  From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry , 2003 .

[135]  J. E. Griffith,et al.  Dimensional metrology with scanning probe microscopes , 1993 .

[136]  Shunji Watanabe,et al.  Micro‐fabricated piezoelectric cantilever for atomic force microscopy , 1996 .

[137]  Eugene L. Church,et al.  Effects of the nonvanishing tip size in mechanical profile measurements , 1991, Optics & Photonics.

[138]  Lars Montelius,et al.  Direct observation of the atomic force microscopy tip using inverse atomic force microscopy imaging , 1994 .

[139]  Othmar Marti,et al.  A stand-alone scanning force and friction microscope , 1992 .

[140]  Hans-Ulrich Danzebrink,et al.  Development of a scanning probe microscope compact sensor head featuring a diamond probe mounted on a quartz tuning fork , 2003 .

[141]  Teodor Gotszalk,et al.  Characterization of a cantilever with an integrated deflection sensor , 1995 .

[142]  Alex Buxbaum,et al.  Phase standard based on profilometer metrology standard , 2004, SPIE Photomask Technology.

[143]  Angela Duparré,et al.  Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications. , 2002, Applied optics.

[144]  K. R. Koops,et al.  Traceable Probing with an AFM , 2006 .

[145]  T. Itoh,et al.  Development of a force sensor for atomic force microscopy using piezoelectric thin films , 1993 .

[146]  M. Shikida,et al.  Proposal of new type of micro-machined quartz tuning fork AFM probe , 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

[147]  G. L. Miller,et al.  A scanning tunneling microscope with a capacitance‐based position monitor , 1990 .

[148]  Chuen-Horng Tsai,et al.  Fabrication of individual aligned carbon nanotube for scanning probe microscope , 2005 .

[149]  Harald Bosse,et al.  Comparison of Different Methods of SFM Tip Shape Determination for Various Characterisation Structures and Types of Tip , 2006 .

[150]  Stephan Herminghaus,et al.  Capillary forces in tapping mode atomic force microscopy , 2002 .

[151]  J. Villarrubia.  Algorithms for Scanned Probe Microscope Image Simulation, Surface Reconstruction, and Tip Estimation , 1997, Journal of research of the National Institute of Standards and Technology.

[152]  S. Gonda,et al.  Accurate topographic images using a measuring atomic force microscope , 1999 .

[153]  F. Cerrina,et al.  The effect of process coatings on the alignment signal in a proximity lithography system , 1990 .

[154]  Helmut Wolff,et al.  Design and three dimensional calibration of a measuring scanning tunneling microscope for metrological applications , 1994 .

[155]  G. Binnig,et al.  Scanning tunneling microscopy , 1984 .

[156]  J. E. Stern,et al.  Force microscope using a fiber‐optic displacement sensor , 1988 .

[157]  Manfred H. Jericho,et al.  A scanning force microscope with a fiber‐optic‐interferometer displacement sensor , 1991 .

[158]  Liam Blunt,et al.  Calibration of step heights and roughness measurements with atomic force microscopes , 2003 .

[159]  C. Quate,et al.  Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators , 1995 .

[160]  Roland Wiesendanger.  Scanning probe microscopy : analytical methods , 1998 .

[161]  Vladimir V. Tsukruk,et al.  Spring constants of composite ceramic/gold cantilevers for scanning probe microscopy , 1999 .

[162]  Gaoliang Dai,et al.  Measurement of micro-roughness using a metrological large range scanning force microscope , 2004 .

[163]  Diana Nyyssonen,et al.  Two‐dimensional atomic force microprobe trench metrology system , 1991 .

[164]  S. Gonda,et al.  REAL-TIME, INTERFEROMETRICALLY MEASURING ATOMIC FORCE MICROSCOPE FOR DIRECT CALIBRATION OF STANDARDS , 1999 .

[165]  C. Gibson,et al.  Calibration of silicon atomic force microscope cantilevers , 2005, Nanotechnology.

[166]  U. Bonse,et al.  AN X‐RAY INTERFEROMETER , 1965 .

[167]  Kevin D. Maranowski,et al.  GaAs/AlGaAs self-sensing cantilevers for low temperature scanning probe microscopy , 1998 .

[168]  H. Kumar Wickramasinghe,et al.  Method for imaging sidewalls by atomic force microscopy , 1994 .

[169]  J. B. Bryan,et al.  Design and construction of an ultraprecision 84 inch diamond turning machine , 1979 .

[170]  I. Busch,et al.  Realisation and metrological characterisation of thickness standards below 100 nm , 2004 .

[171]  Thorsten Dziomba,et al.  A landmark-based 3D calibration strategy for SPM , 2007 .

[172]  Uzi Landman,et al.  Structural and dynamical consequences of interactions in interfacial systems , 1989 .

[173]  C. Quate,et al.  Atomic resolution with an atomic force microscope using piezoresistive detection , 1993 .

[174]  Hertz.  On the Contact of Elastic Solids , 1882 .

[175]  A. Duparré,et al.  Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components. , 2002, Applied optics.

[176]  J. Neumeister,et al.  Lateral, normal, and longitudinal spring constants of atomic force microscopy cantilevers , 1994 .

[177]  Ronald G. Dixson,et al.  Conformal oxides on Si surfaces , 1997 .

[178]  Ichiko Misumi,et al.  Impacts of probe-tip tilt on scanning probe microscopy , 2004 .

[179]  J. M. Drake,et al.  Special Issue: Dynamics of Molecular Systems , 1990 .

[180]  Bharat Bhushan,et al.  Applied scanning probe methods , 2006 .

[181]  Ludger Koenders,et al.  Towards a Guideline for SPM Calibration , 2006 .

[182]  Ute Drechsler,et al.  Highly parallel data storage system based on scanning probe arrays , 2000 .

[183]  James C. Wyant,et al.  Large Field of View, High Spatial Resolution, Surface Measurements , 1998 .

[184]  Jochen Mannhart,et al.  Stability considerations and implementation of cantilevers allowing dynamic force microscopy with optimal resolution: the qPlus sensor , 2004 .

[185]  Egbert Oesterschulze,et al.  Fabrication of integrated diamond cantilevers with tips for SPM applications , 1997 .

[186]  M. Klonowski,et al.  Advanced atomic force microscopy probes: Wear resistant designs , 2005 .

[187]  Jiunn-Jong Wu,et al.  Spectral analysis for the effects of stylus tip curvature on measuring fractal profiles , 2000 .

[188]  H. Drew,et al.  Capacitive sensor for micropositioning in two dimensions , 1998 .

[189]  Calvin F. Quate,et al.  Improved atomic force microscope images using microcantilevers with sharp tips , 1990 .

[190]  J. F. Jorgensen,et al.  Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing , 1998 .

[191]  Jiunn-Jong Wu.  Spectral analysis for the effects of stylus tip curvature on measuring isotropic rough surfaces , 2002 .

[192]  Johann Foucher,et al.  Study of 3D metrology techniques as an alternative to cross-sectional analysis at the R&D level , 2004, SPIE Advanced Lithography.

[193]  P Muralt,et al.  Wide-range, low-operating-voltage, bimorph STM: Application as potentiometer , 1986, IBM J. Res. Dev..

[194]  H. Kumar Wickramasinghe,et al.  Toward accurate metrology with scanning force microscopes , 1995 .

[195]  Sitian Gao,et al.  Comparison on Nanometrology: Nano 2?Step height , 2003 .

[196]  Jon R. Pratt,et al.  Review of SI traceable force metrology for instrumented indentation and atomic force microscopy , 2005 .

[197]  Hemantha K. Wickramasinghe,et al.  Atomic force microscope–force mapping and profiling on a sub 100‐Å scale , 1987 .

[198]  John Hedley,et al.  Quantitative analytical atomic force microscopy: a cantilever reference device for easy and accurate AFM spring-constant calibration , 2004 .

[199]  Charles M. Lieber,et al.  High-yield assembly of individual single-walled carbon nanotube tips for scanning probe microscopies , 2001 .

[200]  Hal Edwards,et al.  Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurements , 1998 .

[201]  Xudong Xiao,et al.  Investigation of Humidity-Dependent Capillary Force , 2000 .

[202]  A. L. Bogdanov,et al.  Fabrication of arrays of nanometer size test structures for scanning probe microscope tips characterization , 1994 .

[203]  H. Wolff,et al.  A compact sensor head for simultaneous scanning force and near-field optical microscopy , 2002 .

[204]  K. Johnson,et al.  A Continuum Mechanics Model of Adhesion and Friction in a Single Asperity Contact , 1997 .

[205]  N. Amer,et al.  Novel optical approach to atomic force microscopy , 1988 .

[206]  U. Fischer,et al.  Scanning Near Field Optical Microscopy , 1992 .

[207]  M. Meyyappan,et al.  Carbon nanotube tip probes: stability and lateral resolution in scanning probe microscopy and application to surface science in semiconductors , 2001 .

[208]  T. Fujii,et al.  Scanning tunneling microscope coaxially arranged with an optical microscope , 1992 .

[209]  T. Itoh,et al.  Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities , 1999 .

[210]  Kevin M. Shakesheff,et al.  Blind reconstruction of scanning probe image data , 1996 .

[211]  Lutz Doering,et al.  Piezoresistive cantilever as portable micro force calibration standard , 2003 .

[212]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[213]  G. McClelland,et al.  Atomic force microscopy using optical interferometry , 1988 .

[214]  H Han Haitjema.  International comparison of depth-setting standards , 1997 .

[215]  Angela Duparré,et al.  Entwicklung einer Kalibrierrichtlinie für Rastersondenmikroskope (Development of a Calibration Guideline for Scanning Probe Microscopes) , 2005 .

[216]  B. V. Derjaguin,et al.  Effect of contact deformations on the adhesion of particles , 1975 .

[217]  David L. Trumper,et al.  The long-range scanning stage: a novel platform for scanned-probe microscopy , 2000 .

[218]  Gaoliang Dai,et al.  Metrological large range scanning probe microscope , 2004 .

[219]  Koji Takada,et al.  Long atomic imaging over a 5-μm-long region using an ultralow thermally drifted dual-tunneling-unit scanning tunneling microscope in a thermostabilized cell , 1999 .

[220]  Chengkuo Lee,et al.  Deflection detection and feedback actuation using a self‐excited piezoelectric Pb(Zr,Ti)O3 microcantilever for dynamic scanning force microscopy , 1996 .

[221]  Ronald G. Dixson,et al.  Accurate dimensional metrology with atomic force microscopy , 2000, Advanced Lithography.