Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET^TM

We present a new and unique software program, IMSET, capable of finding optimal designs for computer experiments. A finite-element simulation of a micromachined flow sensor was used to illustrate macromodel generation and to compare the quality of the IMSET design with other approaches. Coupled with an appropriate analysis, IMSET provides a highly efficient means of nonparametric macromodel generation. IMSET is available on the World-Wide Web.