Bulk acoustic wave RF technology

In this article, we will provide an overview of BAW filter technology by discussing comparison between BAW and SAW RF filter technologies, working principles of BAW resonator and filter, BAW resonator key performance parameters, comparison between free-standing bulk acoustic resonator (FBAR) and solidly mounted resonator (SMR) technologies, status of BAW resonator design and models, BAW filter manufacturing challenges, and future BAW technology improvement directions.

[1]  R. Ruby,et al.  FBAR—From Technology Development to Production-- , 2004 .

[2]  K. Lakin,et al.  Thin film resonator technology , 2003, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[3]  T. Forshaw.  Everything you always wanted to know , 1977 .

[4]  Performance degradation effects in FBAR filters and resonators due to lamb wave modes , 2005, IEEE Ultrasonics Symposium, 2005..

[5]  S. Gopani,et al.  Dynamic visualization of subangstrom high-frequency surface vibrations , 2001 .

[6]  Jun Tsutsumi,et al.  Extremely low-loss SAW filter and its application to antenna duplexer for the 1.9 GHz PCS full-band , 2003, IEEE International Frequency Control Symposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 2003. Proceedings of the 2003.

[7]  S. Bader,et al.  12E-0 2X Size and Cost Reduction of Film Bulk Acoustic Resonator (FBAR) Chips with Tungsten Electrodes for PCS/GPS/800 MHz Multiplexers , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[8]  B. Barber,et al.  11E-0 Improve MBVD Model to Consider Frequency Dependent Loss for BAW Filter Design , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[9]  J. Kaitila,et al.  3C-1 Review of Wave Propagation in BAW Thin Film Devices - Progress and Prospects , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[10]  Kenneth Meade Lakin,et al.  A review of thin-film resonator technology , 2003 .

[11]  Tsutomu Miyashita,et al.  High performance and miniature thin film bulk acoustic wave filters for 5 GHz , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[12]  R. Ruby.  11E-2 Review and Comparison of Bulk Acoustic Wave FBAR, SMR Technology , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[13]  R. Aigner,et al.  Optimization of acoustic dispersion for high performance thin film BAW resonators , 2005, IEEE Ultrasonics Symposium, 2005..

[14]  Robert Aigner,et al.  Thin film bulk acoustic wave devices for applications at 5.2 GHz , 2003, IEEE Symposium on Ultrasonics, 2003.

[15]  Kenneth Meade Lakin,et al.  Coupled resonator filters , 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

[16]  Joel F. Rosenbaum,et al.  Bulk Acoustic Wave Theory and Devices , 1988 .

[17]  C. Metzmacher,et al.  SIMULATION OF SECOND-ORDER EFFECTS IN SBAR AND FBAR , 2004 .

[18]  John D. Larson,et al.  Thin film bulk wave acoustic resonators (FBAR) for wireless applications , 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).

[19]  K.M. Lakin,et al.  Bulk acoustic wave resonators and filters for applications above 2 GHz , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[20]  R. Aigner,et al.  Single-to-balanced filters for mobile phones using coupled resonator BAW technology , 2004, IEEE Ultrasonics Symposium, 2004.

[21]  M. Hara,et al.  12E-2 X-Band Filters Utilizing AlN Thin Film Bulk Acoustic Resonators , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.