Polymer–Silicon Flexible Structures for Fast Chemical Vapor Detection

Abstract : Although there are several aspects that contribute to an efficient chemical sensor system, the choice of responsive materials can help to optimize several key attributes critical for their ultimate performance, specifically high sensitivity, selectivity, fast response time, and wide dynamic range. Some common issues reported to date for sensors are limited detection range, slow response time, long recovery period, and fast saturation (limited dynamic range). Most of these issues are directly related to the large volume of bulk porous material that is needed for measurable signal output, which leads to inherently slow sorption, diffusion, and desorption processes. One type of gas sensor that receives only limited attention despite being among the most frequently used sensors for measuring important environmental quantities is the humidity sensor.[2] Important applications of this type of sensor include for respiratory equipment, incubators, chemical gas purification, and surgical operations. The main requirements for humidity sensors are good sensitivity over a wide humidity range, low hysteresis, good reproducibility, and longevity. Often sensors are required to be very small and suitable for integration into arrayed systems, such as odor-sensing arrays.

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