Routes to failure in rotating MEMS devices experiencing sliding friction
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Paul J. McWhorter | Samuel Lee Miller | Jeffry J. Sniegowski | M. Steven Rodgers | J. P. Waters | Glen LaVigne | M. S. Rodgers | James Waters | P. McWhorter | J. Sniegowski | S. Miller | G. LaVigne
[1] J.J. Sniegowski,et al. Surface-micromachined gear trains driven by an on-chip electrostatic microengine , 1996, IEEE Electron Device Letters.
[2] Paul J. McWhorter,et al. Friction in surface-micromachined microengines , 1996, Smart Structures.
[3] Ernest J. Garcia,et al. Surface micromachined microengine , 1995 .
[4] Ernest J. Garcia,et al. Microfabricated actuators and their application to optics , 1995, Photonics West.
[5] R. J. Collins,et al. Performance impact of monolayer coating of polysilicon micromotors , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.
[6] Roger T. Howe,et al. Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.
[7] Paul J. McWhorter,et al. Embedded micromechanical devices for the monolithic integration of MEMS with CMOS , 1995, Proceedings of International Electron Devices Meeting.
[8] Wolfgang Kuehnel,et al. A surface micromachined silicon accelerometer with on-chip detection circuitry , 1994 .
[9] Jeffrey H. Lang,et al. Friction and wear in microfabricated harmonic side-drive motors , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.
[10] Paul J. McWhorter,et al. Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine , 1996 .
[11] J. J. Sniegowski,et al. Performance Tradeoffs for a Surface Micromachined , 1997 .