论文信息 - Transmission electron microscopy of Si3N4/SiO2 structures for local oxidation processes - 字舞流文

Transmission electron microscopy of Si3N4/SiO2 structures for local oxidation processes

S Amelinckx | J Van Landuyt | J Vanhellemont | C Claeys | G Declerck | R Van Overstraeten

[1] F. Habraken,et al. Thermal nitridation of silicon dioxide films , 1982 .