论文信息 - Development of next generation excimer lasers for industrial applications

Development of next generation excimer lasers for industrial applications

The report reviews the results of developments of the perspective excimer lasers which has been carried out in Pulsed Laser System Laboratory at TRINITI. We present parameters of XeCl laser (λ=308 nm) with average power up to 500 W and ArF laser (λ=193 nm) with a pulse repetition rate ≥6 kHz.

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