论文信息 - Electrical study of microfluidic channels isolated with chemically modified porous silicon

Electrical study of microfluidic channels isolated with chemically modified porous silicon

This paper deals with On-Chip-Electrophoresis separation systems micromachined on porous silicon. The electrical insulation properties of the porous substrates were analyzed and related to physical and chemical treatments such as thermal oxidation and silanisation. From this preliminary study, microfluidic devices including silanized porous silicon layers were realized. Finally, ANSYS 3D-Finite Element Modelling of a microfluidic device was performed using experimental data from the electrical measurements. The geometrical and electrical limitations were then discussed. (© 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

D. Barbier | C. Malhaire | B. Remaki | E. Méry

[1] A. van den Berg,et al. Porous silicon as a stationary phase for shear-driven chromatography. , 2004, Journal of chromatography. A.

[2] V. Lysenko,et al. Electrical barrier properties of meso-porous silicon , 2003 .

[3] Mark S. Sherwin,et al. Two-dimensional terahertz photonic crystals fabricated by deep reactive ion etching in Si , 2003 .

[4] Vincent Studer,et al. Nanoimprint lithography for the fabrication of DNA electrophoresis chips , 2002 .

[5] L. Locascio,et al. Integrated microfluidic system enabling protein digestion, peptide separation, and protein identification. , 2001, Analytical chemistry.

[6] Robert S Foote,et al. Preconcentration of proteins on microfluidic devices using porous silica membranes. , 2005, Analytical chemistry.