Unsteady 3D Rarefied Flow Solver Based on Boltzmann-ESBGK Model Kinetic Equations

Formulation and verification of unsteady rarefied flow solver based on BoltzmannESBGK equations in arbitrary three-dimensional geometries is presented. The solver is based on the finite volume method in physical space and the discrete ordinate method in velocity space with an implicit time discretization. Verification is carried out for an unsteady approach to equilibrium, a steady one-dimensional Couette flow and a two-dimensional quasi-steady gas damping problem. Finally, the application of the full 3D parallel solver is considered to simulate unsteady microscale gas damping in a micro-electro-mechanical system switch.

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