Theories of the distribution of deposit from sputtered disk and rectangular electrodes

Theoretical expressions for the distribution of deposits sputtered from disk-shaped and rectangular electrodes are derived for cases of 1) uniform emission obeying the cosine emission law, 2) distorted "under cosine" and "over cosine" emission, 3) additional emission confined to the peripheries of the electrodes and obeying the cosine emission law, and 4) distorted "inward" emission from the peripheries.