论文信息 - In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes - 字舞流文

In situ oxygen plasma cleaning of microswitch surfaces—comparison of Ti and graphite electrodes

M. P. Boer | F. Streller | W. R. Ashurst | R. Carpick | Changho Oh | M. D. de Boer | W. Ashurst