Measurement and control of straight motion accuracy using liquid surface for absolute reference
暂无分享,去创建一个
[1] Akira Shimokohbe,et al. An Ultra Precision Straight Motion System (2nd Report) , 1988 .
[2] Masaru Uchiyama,et al. Formation of High-Speed Motion Pattern of a Mechanical Arm by Trial , 1978 .
[3] Akira Shimokohbe,et al. An ultra precision straight motion system. (1st report). Two degrees of freedom control of motion. , 1988 .
[4] Akira Shimokohbe,et al. An active air bearing. Ultra-precision control of floating position and vibration. , 1988 .