Scanning Electron Diffraction Attachment with Electron Energy Filtering

A scanning electron diffraction attachment providing for energy analysis of the scattered electrons has been constructed for use in conjunction with a J.E.M. 6AS electron microscope. This attachment permits the direct recording of diffracted electron intensities as a function of angle with an accuracy of ±0.1%. The attachment can be operated to exclude all but the elastically diffracted electrons, or, alternatively, to detect electrons with a measurable amount of energy loss. The electrostatic energy analyzer has an energy cutoff of better than 1.1 eV out of 100 keV. The angular resolution of the instrument is presently 2.2×10−4 rad, with minimum detectable electron intensity of 10−14 A. The instrument performance is demonstrated by studying the effect of inelastic scattering in the diffraction pattern of aluminum, and by recording the plasma loss spectrum of aluminum. The filtered profiles have narrower peaks than the unfiltered ones and better peak resolution, and the contrast between peaks and backgrou...