The control technique and the finite element analysis (FEA) of active polishing lap based on the ANSYS

The mechanical construction and basic principle of the active polishing lap are introduced, the testing method has been exploited, and the displacement quantity of the deformation has been discussed. The finite element model of the lap has been constructed by the ANSYS, and then the simulation results are obtained under the conditions of the control procedure of the lap. Through the comparison study between simulation data and the experiment data, one can find that the model can be used to obtain the data for the design of the controller of the lap.