Nanofabrication of gallium nitride photonic crystal light-emitting diodes

We describe a comparison of nanofabrication technologies for the fabrication of 2D photonic crystal structures on GaN/InGaN blue LEDs. Such devices exhibit enhanced brightness and the possibility of controlling the angular emission profile of emitted light. This paper describes three nano lithography techniques for patterning photonic crystal structures on the emitting faces of LEDs: direct-write electron beam lithography, hard stamp nanoimprint lithography and soft-stamp nanoimprint lithography with disposable embossing masters. In each case we describe variations on the technique as well as its advantages and disadvantages. Complete process details have been given for all three techniques. In addition, we show how high performance GaN dry etch techniques, coupled with optical process monitoring can transfer resist patterns into underlying GaN material with high fidelity.

[1]  L. Guo,et al.  High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates , 2008 .

[2]  B. Schineller,et al.  Important aspects for the mass production of GaN-based quantum devices grown by MOCVD , 2007 .

[3]  M. Craford,et al.  Status and Future of High-Power Light-Emitting Diodes for Solid-State Lighting , 2007, Journal of Display Technology.

[4]  Dry etching characteristics of GaN for blue/green light-emitting diode fabrication , 2009 .

[5]  J. Park,et al.  Lattice Constant Effect of Photonic Crystals on the Light Output of Blue Light-Emitting Diodes , 2008, IEEE Photonics Technology Letters.

[6]  James S. Speck,et al.  Directional emission control and increased light extraction in GaN photonic crystal light emitting diodes , 2008 .

[7]  Kazuyoshi Iida,et al.  High-Efficiency Nitride-Based Light-Emitting Diodes with Moth-Eye Structure , 2005 .

[8]  L. J. Guo,et al.  Nanoimprint Lithography: Methods and Material Requirements , 2007 .

[9]  C. Weisbuch,et al.  Optimization of Light-Diffracting Photonic-Crystals for High Extraction Efficiency LEDs , 2007, Journal of Display Technology.

[10]  M. Dawson,et al.  Thinning of N-face GaN (0001 ¯) samples by inductively coupled plasma etching and chemomechanical polishing , 2007 .

[11]  Ki-Dong Lee,et al.  Light extraction enhancement from nano-imprinted photonic crystal GaN-based blue light-emitting diodes. , 2006, Optics express.

[12]  Edgar Voges,et al.  Reactive ion etching of silicon submicron-sized trenches in SF6/C2Cl3F3 plasma , 1995 .

[13]  C. Michael Bourget,et al.  An Introduction to Light-emitting Diodes , 2008 .

[14]  Kee-Bong Choi,et al.  Nano-scale patterning using the roll typed UV-nanoimprint lithography tool , 2008 .

[15]  G. G. Stokes.  "J." , 1890, The New Yale Book of Quotations.

[16]  Steven M. Durbin,et al.  Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures: Preface , 2009 .

[17]  Tom Oder,et al.  III-nitride photonic crystals , 2003 .

[18]  M. Charlton,et al.  Enhanced Light Extraction by Photonic Quasi-Crystals in GaN Blue LEDs , 2009, IEEE Journal of Selected Topics in Quantum Electronics.

[19]  M. C. Netti,et al.  Complete photonic bandgaps in 12-fold symmetric quasicrystals , 2000, Nature.

[20]  Frantisek Uherek,et al.  Wafer-scale transfer of nanoimprinted patterns into silicon substrates , 2009 .

[21]  Ki-Dong Lee,et al.  Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography , 2007 .

[22]  Jonathan J. Wierer,et al.  III -nitride photonic-crystal light-emitting diodes with high extraction efficiency , 2009 .

[23]  Gilbert Held,et al.  Introduction to Light Emitting Diode Technology and Applications , 2008 .

[24]  M. Shur,et al.  Introduction to Solid-State Lighting , 2002 .

[25]  Seong-Ju Park,et al.  Improved light-output and electrical performance of InGaN-based light-emitting diode by microroughening of the p-GaN surface , 2003 .

[26]  Chaowang Liu,et al.  Quantitative simulation of in situ reflectance data from metal organic vapour phase epitaxy of GaN on sapphire , 2007 .

[27]  M. Krames,et al.  Performance of High Power Light Emitting Diodes in Display Illumination Applications , 2007, Journal of Display Technology.

[28]  E. Kley,et al.  Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography , 2007 .

[29]  S. Zankovych,et al.  A comparison of thermally and photochemically cross-linked polymers for nanoimprinting , 2003 .

[30]  David R. Clarke,et al.  Mechanics of laser-assisted debonding of films , 2001 .

[31]  Tsunemasa Taguchi,et al.  High Output Power InGaN Ultraviolet Light-Emitting Diodes Fabricated on Patterned Substrates Using Metalorganic Vapor Phase Epitaxy , 2001 .

[32]  K. A. Bulashevich,et al.  Current spreading and thermal effects in blue LED dice , 2007 .

[33]  D. A. Contreras-Solorio,et al.  Electronic structure of cubic GaN/AlGaN quantum wells , 2003 .

[34]  Norbert Linder,et al.  Photonic crystal LEDs – designing light extraction , 2009 .