MEMS for IT applications

The recent progress of MEMS in Samsung Advanced Institute of Technology (SAIT) is presented, focusing on MEMS applications to information technology (IT). The items introduced include: (1) a MEMS gyroscope for consumer electronics; (2) an electrostatic secondary stage MEMS actuator for high density HDD; (3) a micro cooling system for cooling of high performance chips; and (4) a RF MEMS switch for mobile phones. Emphases are given to the factors affecting the commercial success of MEMS as well as the impact of MEMS on future IT.

[1]  Byeungleul Lee,et al.  Force-balanced dual-axis microgyroscope , 1997, Smart Materials, Nano-, and Micro- Smart Systems.

[2]  Yong-Soo Oh,et al.  Wafer level vacuum packaged de-coupled vertical gyroscope by a new fabrication process , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[3]  B. H. An,et al.  A symmetrical z-axis gyroscope with a high aspect ratio using simple and new process , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[4]  Byeungleul Lee,et al.  Dynamically tuned vibratory micromechanical gyroscope accelerometer , 1997, Smart Materials, Nano-, and Micro- Smart Systems.

[5]  Y. Eugene Pak,et al.  Heat transfer enhancement using flow-induced vibration of a microfin array , 2001 .

[6]  S. Eshelman,et al.  Characteristics of micromachined switches at microwave frequencies , 1996, 1996 IEEE MTT-S International Microwave Symposium Digest.

[7]  M. F. Chang,et al.  A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[8]  R. Horowitz,et al.  Design and fabrication of an angular microactuator for magnetic disk drives , 1998 .