Fabrication of ultrasmooth complementary split ring resonators by an improved template stripping method on SU-8

It has been demonstrated that metamaterials play a very important role in plasmonic devices. The behavior of surface plasmon polaritons (SPPs) is highly related with the roughness of metal/dielectric interface, for instance, a smooth metal surface can largely elongate the propagation length of SPP. In this work, an improved template stripping method is developed to fabricate ultrasmooth metamaterials of nanoscale complementary split ring resonators (CSRRs). By using an ultraviolet photoresist of SU-8 as the adhesive, nanoscale metal CSRR structures with ultrasmooth surface were peeled off from silicon template by employing a combined process of pre-baking, UV irradiation and post-baking. By optimization of the pre-baking temperature and the depth of the nanopatterns, ultrasmooth nanoscale CSRRs with a gap of 30nm were obtained. Our results indicate that the approach of template stripping by implementation of an SU-8 adhesive layer is an effective method to produce elaborated hollow nanostructures with ultrasmooth surface and nanoscale gap, which may have potentials in sensing applications.

[1]  Urs Sennhauser,et al.  Atomically flat single-crystalline gold nanostructures for plasmonic nanocircuitry. , 2010, Nature communications.

[2]  Prashant Nagpal,et al.  Three-dimensional plasmonic nanofocusing. , 2010, Nano letters.

[3]  Jiangdong Deng,et al.  Micro- and nanopatterning of inorganic and polymeric substrates by indentation lithography. , 2010, Nano letters.

[4]  A. Vélez,et al.  Dual-band microwave duplexer based on spiral resonators (SR) and complementary split ring resonators (CSRR) , 2011 .

[5]  Ajay Nahata,et al.  Planar terahertz waveguides based on complementary split ring resonators. , 2011, Optics express.

[6]  Jun Xu,et al.  Ultrafine and smooth full metal nanostructures for plasmonics. , 2010, Advanced materials.

[7]  Sang‐Hyun Oh,et al.  Ultrasmooth Patterned Metals for Plasmonics and Metamaterials , 2009, Science.

[8]  Txema Lopetegi,et al.  Application of Complementary Split-Ring Resonators to the Design of Compact Narrow Band-Pass Structures in Microstrip Technology , 2005 .

[9]  J. Bonache,et al.  Babinet principle applied to the design of metasurfaces and metamaterials. , 2004, Physical review letters.

[10]  Jan Schroers,et al.  Atomically smooth surfaces through thermoplastic forming of metallic glass , 2010 .

[11]  J. Pendry,et al.  Magnetism from conductors and enhanced nonlinear phenomena , 1999 .

[12]  Gang-yu Liu,et al.  Fabrication of Nanometer Scale Patterns within Self-Assembled Monolayers by Nanografting , 1999 .

[13]  Jae-Wook Kang,et al.  Simple and Low Cost Fabrication of Thermally Stable Polymeric Multimode Waveguides using a UV-curable Epoxy , 2003 .

[14]  J. Bonache,et al.  Novel microstrip bandpass filters based on complementary split-ring resonators , 2006, IEEE Transactions on Microwave Theory and Techniques.

[15]  Prashant Nagpal,et al.  Template-stripped smooth Ag nanohole arrays with silica shells for surface plasmon resonance biosensing. , 2011, ACS nano.