Soft x-ray nanoscale imaging using highly brilliant laboratory sources and new detector concepts

In this contribution, we report about nanoscale imaging using a laser produced plasma source based laboratory transmission X-ray microscope (LTXM) in the water window. The highly brilliant soft X-ray radiation of the LTXM is provided by a laser-produced nitrogen plasma source focused by a multilayer condenser mirror to the sample. An objective zone plate maps the magnified image of the sample on the super resolution camera. This camera employs a deep cooled soft-X-ray CCD imaging sensor sandwiched with a xy piezo stage to allow subpixel displacements of the detector. The camera is read out using a very low noise electronics platform, also directing low µm shifts of the sensor between subsequent image acquisitions. Finally an algorithm computes a high resolution image from the individual shifted low-resolution image frames.

[1]  Michael Zürch,et al.  Extreme ultraviolet digital in-line holography using a tabletop source. , 2015, Applied optics.

[2]  Sabine Süsstrunk,et al.  A Frequency Domain Approach to Registration of Aliased Images with Application to Super-resolution , 2006, EURASIP J. Adv. Signal Process..

[3]  Harry Shum,et al.  Fundamental limits of reconstruction-based superresolution algorithms under local translation , 2004, IEEE Transactions on Pattern Analysis and Machine Intelligence.

[4]  Daniel Grötzsch,et al.  3D nanoscale imaging of biological samples with laboratory-based soft X-ray sources , 2015, SPIE Optical Engineering + Applications.

[5]  Aggelos K. Katsaggelos,et al.  Bayesian combination of sparse and non-sparse priors in image super resolution , 2013, Digit. Signal Process..

[6]  M. L. Le Gros,et al.  Numerical Model for Tomographic Image Formation in Transmission X-ray Microscopy References and Links , 2022 .

[7]  Yanwei Liu,et al.  Imaging at the Nanoscale With Practical Table-Top EUV Laser-Based Full-Field Microscopes , 2012, IEEE Journal of Selected Topics in Quantum Electronics.

[8]  J. Limpert,et al.  Real-time and Sub-wavelength Ultrafast Coherent Diffraction Imaging in the Extreme Ultraviolet , 2014, Scientific Reports.

[9]  J. Biegert,et al.  High-flux table-top soft x-ray source driven by sub-2-cycle, CEP stable, 1.85-μm 1-kHz pulses for carbon K-edge spectroscopy. , 2014, Optics letters.

[10]  U Weierstall,et al.  Coherent X-ray diffractive imaging: applications and limitations. , 2003, Optics express.

[11]  Wolfgang Sandner,et al.  X-ray laser takes the 100 Hz barrier , 2009, Optical Engineering + Applications.

[12]  F. Pfeiffer,et al.  X-ray deconvolution microscopy. , 2016, Biomedical optics express.

[13]  Heung-Yeung Shum,et al.  Fundamental limits of reconstruction-based superresolution algorithms under local translation , 2004 .

[14]  B. Kanngießer,et al.  High average power, highly brilliant laser-produced plasma source for soft X-ray spectroscopy. , 2015, The Review of scientific instruments.

[15]  J R Kremer,et al.  Computer visualization of three-dimensional image data using IMOD. , 1996, Journal of structural biology.

[16]  D. DeRosier,et al.  The reconstruction of a three-dimensional structure from projections and its application to electron microscopy , 1970, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences.

[17]  Aydogan Ozcan,et al.  Increased space-bandwidth product in pixel super-resolved lensfree on-chip microscopy , 2013, Scientific Reports.

[18]  Wang,et al.  Soft X‐ray microscopy with a cryo scanning transmission X‐ray microscope: II. Tomography , 2000, Journal of microscopy.

[19]  Yibo Zhang,et al.  Computational out-of-focus imaging increases the space–bandwidth product in lens-based coherent microscopy , 2016 .

[20]  H M Hertz,et al.  Compact x-ray microscope for the water window based on a high brightness laser plasma source. , 2012, Optics express.

[21]  Anders Holmberg,et al.  High-resolution computed tomography with a compact soft x-ray microscope. , 2009, Optics express.