Advanced Transfer Printing With In-Situ Optical Monitoring for the Integration of Micron-Scale Devices

Transfer printing integration of planar membrane devices on photonic and electronic circuits is becoming a well established technology. Typical systems incorporate a single planar layer printed into full contact with the host substrate. In this work we present an advanced transfer print system that enables printing of optical devices in non-planar geometries and allows in-situ optical monitoring of devices. We show micro-resonators with air-clad whispering gallery modes coupled to on-chip waveguides, inverted device printing and three dimensionally assembled micro-cavities incorporating semiconductor micro-lenses and nanowire lasers. We demonstrate printing onto non-standard substrates including optical chip facets and single-mode fibre ends. The optical fibre printing was carried out with alignment assistance from in-situ optical coupling through the transfer printing system in real-time allowing active alignment of the system.

[1]  M. Dawson,et al.  Fabrication and transfer printing basedintegration of free-standing GaN membranemicro-lenses onto semiconductor chips , 2022, Optical Materials Express.

[2]  P. Parkinson,et al.  Optical Characterisation of Nanowire Lasers , 2022, Progress in Quantum Electronics.

[3]  M. Dawson,et al.  Deterministic integration of single nanowire devices with on-chip photonics and electronics , 2022, Progress in Quantum Electronics.

[4]  Kyong-Tae Park,et al.  On-Chip Transferrable Microdisk Lasers , 2020, 2022 Conference on Lasers and Electro-Optics (CLEO).

[5]  T. McKenna,et al.  III/V-on-lithium niobate amplifiers and lasers , 2021, Optica.

[6]  M. Sorel,et al.  High precision integrated photonic thermometry enabled by a transfer printed diamond resonator on GaN waveguide chip. , 2021, Optics express.

[7]  M. Sorel,et al.  Spatially dense integration of micron-scale devices from multiple materials on a single chip via transfer-printing , 2021, Optical Materials Express.

[8]  V. Zwiller,et al.  Deterministic Integration of hBN Emitter in Silicon Nitride Photonic Waveguide , 2021, Advanced Quantum Technologies.

[9]  D. Wallis,et al.  Method for inferring the mechanical strain of GaN-on-Si epitaxial layers using optical profilometry and finite element analysis , 2021, Optical Materials Express.

[10]  M. Sorel,et al.  Automated Nanoscale Absolute Accuracy Alignment System for Transfer Printing , 2020, ACS applied nano materials.

[11]  M. Dawson,et al.  Characterization, Selection, and Microassembly of Nanowire Laser Systems , 2020, Nano letters.

[12]  Hyungwoo Choi,et al.  Emerging material systems for integrated optical Kerr frequency combs , 2020, Advances in Optics and Photonics.

[13]  J. Carolan,et al.  Hybrid integration methods for on-chip quantum photonics , 2019, Optica.

[14]  Dirk Englund,et al.  Large-scale integration of artificial atoms in hybrid photonic circuits , 2020, Nature.

[15]  Geert Morthier,et al.  III-V-on-Si photonic integrated circuits realized using micro-transfer-printing , 2019, APL Photonics.

[16]  Ian Coddington,et al.  Multifunctional integrated photonics in the mid-infrared with suspended AlGaAs on silicon , 2019, Optica.

[17]  Y. Ota,et al.  Three-dimensional photonic crystal simultaneously integrating a nanocavity laser and waveguides , 2019, Optica.

[18]  B. Corbett,et al.  Low-power-consumption optical interconnect on silicon by transfer-printing for used in opto-isolators , 2018, Journal of Physics D: Applied Physics.

[19]  Shun Zhang,et al.  Transfer printing techniques for flexible and stretchable inorganic electronics , 2018, npj Flexible Electronics.

[20]  B Guilhabert,et al.  Hybrid integration of an evanescently coupled AlGaAs microdisk resonator with a silicon waveguide by nanoscale-accuracy transfer printing. , 2018, Optics letters.

[21]  Charalambos Klitis,et al.  High accuracy transfer printing of single-mode membrane silicon photonic devices. , 2018, Optics express.

[22]  K. Watanabe,et al.  Transfer-printed quantum-dot nanolasers on a silicon photonic circuit , 2018, Applied Physics Express.

[23]  Gunther Roelkens,et al.  Comparison of InGaAs and InAlAs sacrificial layers for release of InP-based devices , 2017 .

[24]  Jing Zhang,et al.  Transfer Print Integration of 40Gbps Germanium Photodiodes onto Silicon Photonic ICs , 2017, 2017 European Conference on Optical Communication (ECOC).

[25]  Dirk Englund,et al.  Hybrid Integration of Solid-State Quantum Emitters on a Silicon Photonic Chip. , 2017, Nano letters.

[26]  Gunther Roelkens,et al.  Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors. , 2017, Optics express.

[27]  M. Meitl,et al.  Emissive displays with transfer-printed assemblies of 8 μm × 15 μm inorganic light-emitting diodes , 2017 .

[28]  Dong Liu,et al.  Transfer print techniques for heterogeneous integration of photonic components , 2017 .

[29]  Christopher A. Bower,et al.  Process Capability and Elastomer Stamp Lifetime in Micro Transfer Printing , 2016, 2016 IEEE 66th Electronic Components and Technology Conference (ECTC).

[30]  John A. Rogers,et al.  Heterogeneously Integrated Optoelectronic Devices Enabled by Micro‐Transfer Printing , 2015 .

[31]  David J. Thomson,et al.  Hybrid III--V on Silicon Lasers for Photonic Integrated Circuits on Silicon , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[32]  Erdan Gu,et al.  Nanoscale-accuracy transfer printing of ultra-thin AlInGaN light-emitting diodes onto mechanically flexible substrates , 2013 .

[33]  K. Vahala,et al.  Microresonator frequency comb optical clock , 2013, 1309.3525.

[34]  Audrey M. Bowen,et al.  Transfer Printing Techniques for Materials Assembly and Micro/Nanodevice Fabrication , 2012, Advanced materials.

[35]  Metin Sitti,et al.  Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing , 2010, Proceedings of the National Academy of Sciences.

[36]  Yonggang Huang,et al.  Printed Assemblies of Inorganic Light-Emitting Diodes for Deformable and Semitransparent Displays , 2009, Science.

[37]  H. Miyazaki,et al.  Microassembly of semiconductor three-dimensional photonic crystals , 2003, Nature materials.